Dr. Kenji Honda
Technical Director at Toshiba Corp
SPIE Involvement:
Author
Publications (12)

Proceedings Article | 13 March 2015 Paper
H. Sasaki, A. Mochizuki, Y. Sugiura, R. Hasumi, K. Eda, Y. Egawa, H. Yamashita, K. Honda, T. Ohguro, H. Momose, H. Ootani, Y. Toyoshima, T. Asami
Proceedings Volume 9403, 940302 (2015) https://doi.org/10.1117/12.2077122
KEYWORDS: Sensors, Silicon, Metals, CMOS sensors, Optical filters, Signal to noise ratio, Ion implantation, Signal processing, Quantum efficiency, Signal detection

Proceedings Article | 3 May 2004 Paper
K. Honda, K. Peter, Y. Zhang, B. Yu, K. Park, Xiaolei Li, K. Michaels, Shinichi Yamada, T. Noguchi
Proceedings Volume 5379, (2004) https://doi.org/10.1117/12.544234
KEYWORDS: Metals, Optical proximity correction, Back end of line, Diffractive optical elements, Photomasks, Logic, Resistance, Structural design, Scanning electron microscopy, Very large scale integration

Proceedings Article | 24 July 2002 Paper
Ki-Yong Song, Kwang-Sub Yoon, Sang-Jun Choi, Sang-Gyun Woo, Woo-Sung Han, Jae-Jun Lee, Sang-Kyun Lee, Chang-Ho Noh, Kenji Honda
Proceedings Volume 4690, (2002) https://doi.org/10.1117/12.474248
KEYWORDS: Polymers, Lithography, Absorbance, Etching, Carbonates, Resistance, Plasma, Transparency, Systems modeling, Photoresist materials

Proceedings Article | 24 July 2002 Paper
Jae-Jun Lee, Jin-Baek Kim, Kenji Honda
Proceedings Volume 4690, (2002) https://doi.org/10.1117/12.474206
KEYWORDS: Polymers, Silicon, Lithography, Photoresist materials, Polymerization, Semiconducting wafers, Chemically amplified resists, Spectroscopy, Ultraviolet radiation, Information operations

Proceedings Article | 24 August 2001 Paper
Chang-Ho Noh, Sang-Kyun Lee, Bongsuk Moon, Kenji Honda
Proceedings Volume 4345, (2001) https://doi.org/10.1117/12.436886
KEYWORDS: Polymers, Line edge roughness, Lithography, Carbonates, Photoresist materials, Deep ultraviolet, Photomasks, Image processing, Chemistry, Binary data

Proceedings Article | 16 May 1994 Paper
Tung-Feng Yeh, Jian Huang, Arnost Reiser, Kenji Honda, Bernard Beauchemin, Rodney Hurditch
Proceedings Volume 2195, (1994) https://doi.org/10.1117/12.175379
KEYWORDS: Hydrogen, Absorption, Absorbance, Calibration, Infrared spectroscopy, Carbon, Molecules, Molecular interactions, Deconvolution, Spectroscopy

Proceedings Article | 16 May 1994 Paper
Kenji Honda, Sydney Slater, Bernard Beauchemin, Medhat Toukhy, Sobhy Tadros, Toshiaki Aoai, Yasumasa Kawabe
Proceedings Volume 2195, (1994) https://doi.org/10.1117/12.175367
KEYWORDS: Polymers, Hydrogen, Diffusion, Spectroscopy, Coating, Lithography, Chemistry, Carbon, Magnetism, Liquids

Proceedings Article | 15 September 1993 Paper
Kenji Honda, Andrew Blakeney, Rodney Hurditch, Shiro Tan, Tadayoshi Kokubo
Proceedings Volume 1925, (1993) https://doi.org/10.1117/12.154752
KEYWORDS: Diffusion, Polymers, Spectroscopy, Hydrogen, Absorption, Photoresist developing, Polymerization, Semiconductors, Photoresist materials, Chemistry

Proceedings Article | 15 September 1993 Paper
Chen-Chy Lin, Tung-Feng Yeh, Arnost Reiser, Kenji Honda, Bernard Beauchemin
Proceedings Volume 1925, (1993) https://doi.org/10.1117/12.154806
KEYWORDS: Solids, Diffusion, Molecules, Absorption, Microelectronics, Photoresist materials, Semiconductors, Transform theory, Ions, Molecular interactions

Proceedings Article | 1 June 1992 Paper
Kenji Honda, Bernard Beauchemin, Rodney Hurditch, Andrew Blakeney, Tadayoshi Kokubo
Proceedings Volume 1672, (1992) https://doi.org/10.1117/12.59760
KEYWORDS: Absorption, Absorbance, Ultraviolet radiation, Spectroscopy, Quartz, Polymers, Picture Archiving and Communication System, Hydrogen, Chemistry, FT-IR spectroscopy

Proceedings Article | 1 June 1991 Paper
Kenji Honda, Bernard Beauchemin, Edward Fitzgerald, Alfred Jeffries, Sobhy Tadros, Andrew Blakeney, Rodney Hurditch, Shiro Tan, Shinji Sakaguchi
Proceedings Volume 1466, (1991) https://doi.org/10.1117/12.46365
KEYWORDS: Hydrogen, Polymerization, Solids, Photoresist materials, Polymers, FT-IR spectroscopy, Molecular interactions, Lithography, Spectroscopy, Picture Archiving and Communication System

Proceedings Article | 1 June 1990 Paper
Kenji Honda, Bernard Beauchemin, Rodney Hurditch, Andrew Blakeney, Yasumasa Kawabe, Tadayoshi Kokubo
Proceedings Volume 1262, (1990) https://doi.org/10.1117/12.20104
KEYWORDS: Hydrogen, Picture Archiving and Communication System, Photoresist materials, Polymers, Molecular interactions, Semiconducting wafers, Molecular mechanisms, Solids, Chemical reactions, Molecules

Showing 5 of 12 publications
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