The FePt single layer films with different thickness were deposited by RF magnetron sputtering on glass and Corning glass substrates, and the L10-FePt films were obtained after the as-deposited samples were subjected to vacuum annealing using different cooling processes. It costs 7 hours for the temperature to decrease from 550 to the room temperature during the natural cooling process, however it just costs 1.5 hours during the fast cooling process.Results show that after annealed at for 1h, the perpendicular coercivity of the FePt single layer films decreases with the increasing of FePt layer thickness, and the FePt 15nm film exhibits a high perpendicular coercivity of 8308 Oe and a low in-plane coercivity of 5141 Oe, which suggests that the film exhibits a high perpendicular anisotropy. The FePt films with nature cooling can obtain larger Mr/Ms values than that with fast cooling.
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