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Dr. Jerome Wandell
at EMD Electronics
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Publications (1)
Proceedings Article | 10 April 2024 Presentation
Layout simulation for directed self-assembly with chemo-epitaxy methodology
Shibing Wang, Yixiao Zhang, Jiechang Hou, Yuansheng Ma, Daman Khaira, Germain Fenger, Yuyang Sun, Bassem Hamieh, Boaz Alperson, Durairaj Baskaran, Md Rahman, Jerome Wandell, Youngjun Her
Proceedings Volume 12954, 129540W (2024) https://doi.org/10.1117/12.3010510
KEYWORDS: Directed self assembly, Stochastic processes, Optical lithography, Line edge roughness, Extreme ultraviolet, Atomic layer deposition, Semiconductors, Product engineering, Polymers, Personal protective equipment
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