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Jeffrey J. Persoff
Principal Optical Engineer
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Author
Publications (2)
Proceedings Article | 7 July 1997 Paper
Interferometric lithography exposure tool for 180-nm structures
Proceedings Volume 3048, (1997) https://doi.org/10.1117/12.275785
KEYWORDS: Semiconducting wafers, Lithography, Interferometry, Wafer-level optics, Photoresist processing, Digital signal processing, Laser sources, Photoresist materials, Manufacturing, Optical lithography
Proceedings Article | 1 December 1991 Paper
New wavefront sensor for metrology of spherical surfaces
Stefan Goelz, Jeffrey Persoff, Groff Bittner, Junzhong Liang, Chi-Fu Hsueh, Josef Bille
Proceedings Volume 1542, (1991) https://doi.org/10.1117/12.48833
KEYWORDS: Cornea, Optical spheres, Wavefront sensors, Wavefronts, Eye, Active optics, Zernike polynomials, Spherical lenses, Error analysis, Wavefront aberrations
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