The image quality and accuracy of the atomic force microscope are seriously affected due to drift and hysteresis of Piezoelectric positioning platform. Currently, the distortion correction methods had been confined in tracking a certain area or image correction after images are acquired, which makes it difficult for the atomic force microscope (AFM) to obtain low distortion images. In this study, the scanning path of the AFM is redesigned. The scanning route is spiral in a whole with many blocks which are scanned once at a time, and the drift of blocks is corrected in real-time during the scanning process. This method is suitable for real-time correction of drift during long-time scanning, compared with the traditional scanning method.
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