Relaxation properties of dielectric dipoles such as dielectric frequency dispersion, relaxation time, which should be
optimized in structural material designing, are characterized. Relaxation times of dielectric dipoles of photo resist
materials are characterized by Cole-Cole plot, which is employed to determine a dielectric relaxation time of dipole
moment in polymer structure, based on traditional capacitance method in frequency range of 10mHz to 5MHz. The
relaxation time of dry film resist (DFR) can be determined to be 12.1s. The validity of dielectric properties of DFR film
as a structural material is discussed.
Various sizes of concave square patterns are used for micro bubble adhesion and removal investigation in a
water/methanol mixture solution. As decreasing the surface energy of the solution, the micro bubble is more likely to
remove from the square patterns. However, the micro bubble is less likely to remove as decreasing the square size of
patterns. The threshold concentration of water/methanol solution for bubble removal can be determined. Based on the
surface energy analysis, the adhesion and removal mechanisms of micro bubble can be explained. By applying
alternating electric field to an isolated bubble, electric decomposition of water occurred at the electrode surface. The
possibility of removal control of micro bubble is discussed.
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