Dr. Hao Jiang Profile

KEYWORDS: Optical lithography, Lithography, Double patterning technology, Photomasks, Very large scale integration, Process control, Manufacturing, Manufacturing equipment, Integrated circuits, Integrated optics, Current controlled current source

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Proceedings Article | 15 March 2016 Paper

Optimal design of wide-view-angle waveplate used for polarimetric diagnosis of lithography system

Honggang Gu, Hao Jiang, Chuanwei Zhang, Xiuguo Chen, Shiyuan Liu

Proceedings Volume 9780, 97801M (2016) https://doi.org/10.1117/12.2219139

KEYWORDS: Wave plates, Polarimetry, Immersion lithography, Algorithms, Lithography, Polarization, Magnesium fluoride, Process control, Diagnostics, Lithographic illumination, Sapphire, Refractive index, Geometrical optics

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Proceedings Article | 21 June 2015 Paper

Correction of depolarization effect in Mueller matrix ellipsometry with polar decomposition method

Weiqi Li, Chuanwei Zhang, Hao Jiang, Xiuguo Chen, Honggang Gu, Shiyuan Liu

Proceedings Volume 9526, 952619 (2015) https://doi.org/10.1117/12.2184786

KEYWORDS: Matrices, Silicon, Wave plates, Nanostructures, Mueller matrices, Metrology, Ellipsometry, Scanning electron microscopy, Sensors, Prototyping

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Proceedings Article | 21 June 2015 Paper

Measurement errors induced by axis tilt of biplates in dual-rotating compensator Mueller matrix ellipsometers

Honggang Gu, Chuanwei Zhang, Hao Jiang, Xiuguo Chen, Weiqi Li, Shiyuan Liu

Proceedings Volume 9526, 952617 (2015) https://doi.org/10.1117/12.2184772

KEYWORDS: Polarization, Magnesium fluoride, Calibration, Crystals, Optical components, Error analysis, Wave plates, Geometrical optics, Wave propagation, Prototyping

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Proceedings Article | 3 April 2015 Paper

Simultaneous shear and pressure sensing based on patch antenna

Hao Jiang, Haiying Huang

Proceedings Volume 9435, 943533 (2015) https://doi.org/10.1117/12.2084129

KEYWORDS: Antennas, Reflectors, Sensors, Copper, Error analysis, Electromagnetic interference, Electromagnetism, Numerical simulations, Dielectrics, Electromagnetic radiation

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Proceedings Article | 19 March 2015 Paper

Data refinement for robust solution to the inverse problem in optical scatterometry

Jinlong Zhu, Hao Jiang, Chuanwei Zhang, Xiuguo Chen, Shiyuan Liu

Proceedings Volume 9424, 94240Y (2015) https://doi.org/10.1117/12.2086058

KEYWORDS: Inverse optics, Scatterometry, Inverse problems, Optics manufacturing, Transmission electron microscopy, Error analysis, Integrated optics, Nanostructures, Process control, Chemical elements

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Proceedings Article | 10 April 2014 Paper

Patch antenna based temperature sensor

Hao Jiang, Jeremiah Sanders, Jun Yao, Haiying Huang

Proceedings Volume 9063, 90631P (2014) https://doi.org/10.1117/12.2046427

KEYWORDS: Antennas, Sensors, Dielectrics, Copper, Temperature metrology, Temperature sensors, Error analysis, Aluminum, Foam, Sensing systems

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SPIE Journal Paper | 19 August 2013 Open Access

Measurement configuration optimization for accurate grating reconstruction by Mueller matrix polarimetry

Xiuguo Chen, Shiyuan Liu, Chuanwei Zhang, Hao Jiang

JM3, Vol. 12, Issue 03, 033013, (August 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.3.033013

KEYWORDS: Error analysis, Mueller matrices, Polarimetry, Silicon, Chemical elements, Statistical analysis, Scanning electron microscopy, Inverse problems, Estimation theory, Diffraction

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Proceedings Article | 10 April 2013 Paper

Measurement configuration optimization for grating reconstruction by Mueller matrix polarimetry

Xiuguo Chen, Shiyuan Liu, Chuanwei Zhang, Hao Jiang

Proceedings Volume 8681, 86812B (2013) https://doi.org/10.1117/12.2011487

KEYWORDS: Mueller matrices, Silicon, Polarimetry, Error analysis, Diffraction, Spectroscopy, Scatterometry, Scanning electron microscopy, Inverse optics, Critical dimension metrology

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Showing 5 of 13 publications

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