Flat mirrors have been a consistent part of optical systems with a need to be included in devices such as microscopes and spectrometers Both the cases signify applications in which the limitations of flat mirrors are ever so important in the scope of modern optics, which has applications such as optical tweezers that require high focusing efficiency for trapping and rotation of particles Traditional invisible mirrors feature optical aberrations in off axis applications and further need multifunctional optical devices Metalenses are flat optics patterned with nanostructures, which have already given the potential for focusing and reflecting light without essential energy waste However, most conventional reflective metalenses are using a parabolic phase profile that reshapes the wavefront of the reflected beam The design based on lens models of the sphere leads to an often off the axis of propagation beam rays crossing the metalens nanoparticles, becoming specifically deviated upon them, with a loss of focal accuracy The paper presents a dielectric metalens based on the DMR structure and utilizes a dielectric Distributed Bragg Reflector ( to incorporate high reflection Accordingly, the so developed all dielectric reflector is aimed for the focusing of the incident electromagnetic waves having a wavelength in the visible range at a number of incidence angles, which, perhaps, may reduce major optical aberrations in off axis applications
KEYWORDS: Silicon, Deep reactive ion etching, Nanoimprint lithography, Electron beam lithography, Lithography, Etching, Photoresist materials, Fabrication, Semiconductors, Reactive ion etching
BAlN films were performed by either the flow-modulated epitaxy method or continuous growth method. All BxAl1-xN films are single-phase confirmed by high-resolution 2θ–ω (002) X-ray diffraction. The Boron (B) content of each sample was determined by Secondary Neutral Mass Spectrometry with various values have been achieved from 22 to 34% and reconfirmed by Rutherford backscattering spectrometry. All BAlN samples clearly showed the columnar crystalline on the surface which was observed by AFM measurement. The high B contents can expand the applications of BAlN for deep ultraviolet and power electronic device applications.
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