Mr. Dmitrii A. Nozhkin Profile

Dmitrii A. Nozhkin

at Saratov State University

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Proceedings Article | 29 April 2022 Paper

On the laser micromachining of thin copper-molybdenum alloy films

D. Nozhkin, A. Serdobintsev, I. Kozhevnikov, V. Galushka, A. Pavlov, A. Starodubov, N. Ryskin

Proceedings Volume 12193, 121930J (2022) https://doi.org/10.1117/12.2634207

KEYWORDS: Micromachining, Thin films, Pulsed laser operation, Laser ablation, Laser irradiation, Laser processing

Read Abstract +

Currently, methods of laser micromachining of various kinds of microsized structures are actively developed by scientists and engineers in a variety of fields. Particularly, laser micromachining allows for selective ablation of thin metal films on dielectric substrates in order to create planar conductive structures with rather complex patterns. Meander-like structures on dielectric substrates can serve as a slow-wave structure in perspective compact millimeter band vacuum electronic devices such as traveling-wave tubes. Thus, the aim of this work was to prepare conductive planar structures from thin metal coatings based on a copper-molybdenum alloy. Copper-molybdenum thin films were deposited onto dielectric substrates by magnetron co-sputtering. Then the coatings were micromachined using a nanosecond pulsed laser to form a series of planar structures in the shape of strips of varied width. Deposited coppermolybdenum thin films after laser micromachining suffer from lack of adhesion to the substrates. Possible way to overcome this issue is use of an adhesion sublayer such as titanium or chromium.

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