Chao Zhou
at Institute of Optics and Electronics CAS
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 4 December 2020 Paper
Jie Guo, Debin Pan, Yuan Yao, Yuan Zhao, Siqian Ma, Jixun Liu, Chao Zhou, Haicen Mao
Proceedings Volume 11617, 116173M (2020) https://doi.org/10.1117/12.2585481

Proceedings Article | 23 August 2013 Paper
Proceedings Volume 8911, 89110M (2013) https://doi.org/10.1117/12.2034543
KEYWORDS: Refractive index, Monochromatic aberrations, Objectives, Wavefronts, Nitrogen, Lithography, Image quality, Patents, Photovoltaics, Temperature metrology

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