Dr. Brian R. Harkness
Group Leader at Dow Silicones Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 14 May 2004 Paper
Brian Harkness, Geoff Gardner, James Alger, Michelle Cummings, Jennifer Princing, Yeong Lee, Herman Meynen, Mario Gonzales, Bart Vandevelde, Mathieu Vanden Bulcke, Christophe Winters, Eric Beyne
Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.533804
KEYWORDS: Silicon, Lithography, Optical lithography, Image processing, Metals, Packaging, Coating, Standards development, Photomasks, Semiconducting wafers

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