Dr. Bongkeun Kim Profile

Dr. Bongkeun Kim

at SAMSUNG Electronics Co Ltd

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Author

Publications (4)

SPIE Journal Paper | 26 May 2024

Mask deep check to pre-detect defects in curvilinear mask

Sooyong Lee, Jeeyong Lee, Sinjeung Park, Byungjun Kang, Juyun Park, Bongkeun Kim, Joonsung Kim, Seung-Hune Yang, Seongtae Jeong

JM3, Vol. 23, Issue 02, 021303, (May 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.2.021303

KEYWORDS: Transformers, Visualization, Inspection, Design, Performance modeling, Image classification, Defect detection, Optical proximity correction, Education and training, Deep learning

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Proceedings Article | 22 April 2024 Poster + Paper

Advanced pattern selection and coverage check for computational lithography

Keonwoo Bae, Taekyum Kim, Sanghwa Lee, Bongkeun Kim, Seongtae Jeong, Jenny Tang, Qian Zhao, Yiqiong Zhao, Chang-Il Choi, Jiao Liang, Uwe Paul Schroeder, Mark Simmons

Proceedings Volume 12957, 129571M (2024) https://doi.org/10.1117/12.3009845

KEYWORDS: Calibration, Optical proximity correction, Extreme ultraviolet, Data modeling, Education and training, Performance modeling, Advanced patterning, Metrology, Machine learning, Databases

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Proceedings Article | 10 April 2024 Presentation + Paper

Advanced pattern defect detection and analysis with artificial intelligence

Sangchul Yeo, Yongsun Jang, Yeongju Guk, Seungju Shin, Hee Jeong, Kyungjae Park, Dawoon Choi, Jaewon Yang, Bongkeun Kim, Kyoil Koo, Seongtae Jeong

Proceedings Volume 12955, 129551E (2024) https://doi.org/10.1117/12.3009806

KEYWORDS: Image classification, Semiconducting wafers, Feature extraction, Artificial intelligence, Machine learning, Visualization, Image processing, Image enhancement, Design, Advanced patterning

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Proceedings Article | 21 November 2023 Presentation + Paper

Deep learning-based detection of mask rule check violations in curvilinear mask

Sooyong Lee, Jeeyong Lee, Sinjeung Park, Byungjun Kang, Juyun Park, Bongkeun Kim, Joonsung Kim, Seung-Hune Yang, Seongtae Jeong

Proceedings Volume 12751, 1275109 (2023) https://doi.org/10.1117/12.2685488

KEYWORDS: Transformers, Visualization, Design and modelling, Deep learning, Image classification, Data modeling

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