We investigate the beam splitting phenomena under the case that light is incident obliquely on thin film Fabry-Perot filter and the dispersion diagram of Fabry-Perot filter is shown; Gaussian beam propagating in the structure is analyzed by Fourier decomposition in angular field, transmitted band is calculated by characteristic matrix arithmetic in optical thin film theory. At last, the thin film Fabry-Perot filter device was fabricated by e-beam deposition in vacuum and measured from 782 to 787 achieved by the tunable Ti-sapphire laser. We show the variation of the distance between the splitting spots at different wavelengths by the image of splitting beams we detected, demonstrating the distance achieve maximum at the peak transmittance wavelength because of the largest group delay. And the experimental result is in good agreement with our interpretation.
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