Dr. Arunn Narasimhan Profile

Dr. Arunn Narasimhan

Engineer at TEL FSI Inc

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Publications (2)

SPIE Journal Paper | 1 April 2004

Simulation studies and experimental verification of the performance of a lithocell combination bake-chill station

Arunn Narasimhan, Natarajan Ramanan

JM3, Vol. 3, Issue 02, (April 2004) https://doi.org/10.1117/12.10.1117/1.1668269

KEYWORDS: Semiconducting wafers, 3D modeling, Thermal modeling, Performance modeling, Optical lithography, Thermal analysis, Data modeling, Temperature metrology, Mechanical engineering, Ear

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Proceedings Article | 12 June 2003 Paper

Performance evaluation and analysis of a novel 300-mm combination bake-chill station

Arunn Narasimhan, Natarajan Ramanan, Daniel Williams

Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485199

KEYWORDS: Semiconducting wafers, 3D modeling, Thermal modeling, Performance modeling, Optical lithography, Numerical simulations, Temperature metrology, Thermal analysis, Ear, Thermal effects

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