Dr. Andrea N. Zeppuhar Profile

Dr. Andrea N. Zeppuhar

at Univ of Maryland College Park

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Author

Publications (2)

Proceedings Article | 10 April 2024 Presentation

Multicolor lithography, a promising approach to large-area nanopatterning

Sandra Gutierrez Razo, Nikolaos Liaros, Nicholas Fisher, Andrea Zeppuhar, Mona Abostate, John Petersen, Daniel Falvey, Amy Mullin, John Fourkas

Proceedings Volume PC12956, PC129560H (2024) https://doi.org/10.1117/12.3010932

KEYWORDS: Lithography, Nanostructures, Wafer-level optics, Vacuum, Semiconducting wafers, Photoresist materials, Optical lithography, Near ultraviolet, Materials properties, Light sources

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Proceedings Article | 10 April 2024 Poster

Three-color lithography for high resolution fabrication

Nicholas Fisher, Shuhei Yamaguchi, Sandra Gutierrez Razo, Nikolaos Liaros, Andrea Zeppuhar, Daniel Falvey, John Petersen, John Fourkas

Proceedings Volume PC12956, PC129560Z (2024) https://doi.org/10.1117/12.3010863

KEYWORDS: Photoresist materials, Lithography, Polymerization, Extreme ultraviolet lithography, Visible radiation, Vacuum, Nanostructures, EUV optics, Beam path, Beam diameter

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