Blazed gratings for AR made by contact-mode lithography

Peter Abbamonte; Jonathan Manton; Subhalakshmi Kumar; Samuel Gleason; Cody Jensen; Nick Toombs

doi:10.1117/12.3021557

13 March 2024 Blazed gratings for AR made by contact-mode lithography

Peter Abbamonte, Jonathan Manton, Subhalakshmi Kumar, Samuel Gleason, Cody Jensen, Nick Toombs

Proceedings Volume PC12913, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) V; PC129130E (2024) https://doi.org/10.1117/12.3021557
Event: SPIE AR | VR | MR, 2024, San Francisco, California, United States

Abstract

The oldest and most proven technique for fabricating diffraction gratings is mechanical ruling, which has been used for mass market manufacturing since the early 1960’s. In this talk I will give the latest update on Inprentus’ use of contact‐mode lithography for fabricating aperiodic grating‐coupled waveguides for AR. I will show data demonstrating 20‐picometer pitch uniformity, low stray light levels, aperiodic modulation results, and successful replication in a high‐index (n=1.9) resin using commercially available nanoimprint lithography.

Conference Presentation

Citation Download Citation

Peter Abbamonte, Jonathan Manton, Subhalakshmi Kumar, Samuel Gleason, Cody Jensen, and Nick Toombs "Blazed gratings for AR made by contact-mode lithography", Proc. SPIE PC12913, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) V, PC129130E (13 March 2024); https://doi.org/10.1117/12.3021557

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