Design of a linear-rotary micro-stage

Yuxin Peng; Yasumasa Sakurai; Yoshikazu Arai; Yuki Shimizu; Wei Gao

doi:10.1117/12.904884

15 November 2011 Design of a linear-rotary micro-stage

Yuxin Peng, Yasumasa Sakurai, Yoshikazu Arai, Yuki Shimizu, Wei Gao

Proceedings Volume 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation; 832121 (2011) https://doi.org/10.1117/12.904884
Event: Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 2011, Yunnan, China

Abstract

This paper presents a linear-rotary micro-stage that can generate motions along and about the Z-axis using piezoelectric elements (PZTs). The small stroke of a PZT is extended by repeating the PZT motions based on a mechanism of impact friction drive. The friction drive mechanism has a simple driving unit, which only consists of a PZT element and a friction element. The moving element of the stage, which is a steel cylinder, is supported and actuated by a driving unit, which consists of two PZTs and a friction component made by permanent magnet. The magnetic force is employed for holding the moving element and stabilizing the driving condition. The dimension of the stage is 7.0 mm × 8.8 mm × 7.5 mm. The moving ranges of the stage are about 5.0 mm in the Z-direction and 360 degrees in the θ_z-direction, respectively. The maximum moving speeds are approximately 30 mm/s and 84 rpm in the two directions, respectively.

Citation Download Citation

Yuxin Peng, Yasumasa Sakurai, Yoshikazu Arai, Yuki Shimizu, and Wei Gao "Design of a linear-rotary micro-stage", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 832121 (15 November 2011); https://doi.org/10.1117/12.904884

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