Progress in large-range and nanoscale micromotion stage

Benyong Chen; Junru Wang; Yong Lei

doi:10.1117/12.572897

30 December 2004 Progress in large-range and nanoscale micromotion stage

Benyong Chen, Junru Wang, Yong Lei

Proceedings Volume 5641, MEMS/MOEMS Technologies and Applications II; (2004) https://doi.org/10.1117/12.572897
Event: Photonics Asia, 2004, Beijing, China

Abstract

The recent progress in large-range and nanoscale micromotion stages is summarized, and a novel magnetic levitation stage that can provide large range motion with nanometer positioning accuracy is proposed in this paper. The construction, dynamics analysis, measurement system, and control strategy of this stage are presented and discussed.

Citation Download Citation

Benyong Chen, Junru Wang, and Yong Lei "Progress in large-range and nanoscale micromotion stage", Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); https://doi.org/10.1117/12.572897

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