Mask cycle time reduction for foundry projects

A. Balasinski

doi:10.1117/12.896736

27 September 2011 Mask cycle time reduction for foundry projects

A. Balasinski

Proceedings Volume 8166, Photomask Technology 2011; 81660K (2011) https://doi.org/10.1117/12.896736
Event: SPIE Photomask Technology, 2011, Monterey, California, United States

Abstract

One of key deliverables of foundry based manufacturing is low cycletime. Building new and enhancing existing products by mask changes involves significant logistical effort, which could be reduced by standardizing data management and communication procedures among design house, mask shop, and foundry (fab) [1]. As an example, a typical process of taping out can take up to two weeks in addition to technical effort, for database handling, mask form completion, management approval, PO signoff and JDV review, translating into loss of revenue. In order to reduce this delay, we are proposing to develop a unified online system which should assist with the following functions: database edits, final verifications, document approvals, mask order entries, and JDV review with engineering signoff as required. This would help a growing number of semiconductor products to be flexibly manufactured at different manufacturing sites. We discuss how the data architecture based on a non-relational database management system (NRDMBS) extracted into a relational one (RDMBS) should provide quality information [2], to reduce cycle time significantly beyond 70% for an example 2 week tapeout schedule.

Citation Download Citation

A. Balasinski "Mask cycle time reduction for foundry projects", Proc. SPIE 8166, Photomask Technology 2011, 81660K (27 September 2011); https://doi.org/10.1117/12.896736

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