A DSP-based controller for a linear actuator system with sub-angstrom resolution and 15 millimeter travel range

Alex Smolyanitskiy; Deming Shu; Thomas Wong

doi:10.1117/12.617855

18 August 2005 A DSP-based controller for a linear actuator system with sub-angstrom resolution and 15-millimeter travel range

Alex Smolyanitskiy, Deming Shu, Thomas Wong

Author Affiliations +

Proceedings Volume 5877, Optomechanics 2005; 58770G (2005) https://doi.org/10.1117/12.617855
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

We have designed and tested a new digital signal processor (DSP)-based closed-loop feedback controller for a linear actuator system with sub-angstrom resolution and 15-mm travel range. The linear actuator system consists of a laser Doppler encoder with multiple-reflection optics [1], a high-stiffness weak-link mechanism with high driving sensitivity and stability [2], and a Texas Instruments TMS320C40 DSP-based controller for high-performance closed-loop feedback control. In this paper, we discuss the DSP-based controller design, as well as recent test results yielding step sizes below 50 picometers obtained with the atomic force microprobe setup.

Citation Download Citation

Alex Smolyanitskiy, Deming Shu, and Thomas Wong "A DSP-based controller for a linear actuator system with sub-angstrom resolution and 15-millimeter travel range", Proc. SPIE 5877, Optomechanics 2005, 58770G (18 August 2005); https://doi.org/10.1117/12.617855

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