A new generation cost-efficient laser mask writer for mature semiconductor nodes

Mats O. Rosling; Mikael Wahlsten; Göran Hansson; Anders Svensson; Robert Eklund; Youngjin Park

doi:10.1117/12.2583601

22 February 2021 A new generation cost-efficient laser mask writer for mature semiconductor nodes

Mats O. Rosling, Mikael Wahlsten, Göran Hansson, Anders Svensson, Robert Eklund, Youngjin Park

Proceedings Volume 11613, Optical Microlithography XXXIV; 116130A (2021) https://doi.org/10.1117/12.2583601
Event: SPIE Advanced Lithography, 2021, Online Only

Abstract

A New Generation Cost-efficient Laser Mask Writer for Mature Semiconductor Nodes Mycronic introduces SLX series – a new generation cost-efficient laser mask writer – to meet the ever increasing demand for laser based photomask writer driven by new semiconductor trends such as “More than Moore” and “Electronification of everything”. Photomasks of mature design nodes are required due to large variety of designs combined with price-sensitive low volume manufacturing. In this paper, Mycronic shares key technologies used in SLX series and how to achieve the cost effective mask manufacturing and demonstrates the superiority of the system by trecent evaluation data.

Conference Presentation

Citation Download Citation

Mats O. Rosling, Mikael Wahlsten, Göran Hansson, Anders Svensson, Robert Eklund, and Youngjin Park "A new generation cost-efficient laser mask writer for mature semiconductor nodes", Proc. SPIE 11613, Optical Microlithography XXXIV, 116130A (22 February 2021); https://doi.org/10.1117/12.2583601

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