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7 March 2019 Corrected differential fitting for height extraction in chromatic confocal microscopy
Cheng Chen, WenJun Yang, Hong Zhu, Jian Fu, Chi Zhang, Jian Wang, XiaoJun Liu, Wenlong Lu, Xiangqian Jiang
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Proceedings Volume 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation; 1105322 (2019) https://doi.org/10.1117/12.2511734
Event: 10th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2018), 2018, Kunming, China
Abstract
As for chromatic confocal sensor system with limited computational capacity, a fast peak extraction algorithm with considerate accuracy is in urgent demand. However, current peak extraction algorithms such as the centroid algorithm (CA) and nonlinear fitting algorithms can not balance the accuracy and computational efficiency. Thus, we propose an accurate peak extraction algorithm with good computational efficiency called corrected differential fitting algorithm (CDFA). At first, the differential signal derived from the original axial response signal is linearly fitted for initial peak extraction. Then corresponding systematic error of this linear fitting operation is analyzed using a first-order linear nonhomogeneous differential equation. At last, error compensation, that is, the solution to this equation is implemented with an introduction of "sum differences of sampling intensity". The performance of CDFA is compared with two conventional peak extraction algorithms including the CA and Gaussian fitting algorithm (GFA) using Monte Carlo simulations. CDFA is found to have a comparable accuracy performance with GFA while have a much higher computational efficiency.
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Cheng Chen, WenJun Yang, Hong Zhu, Jian Fu, Chi Zhang, Jian Wang, XiaoJun Liu, Wenlong Lu, and Xiangqian Jiang "Corrected differential fitting for height extraction in chromatic confocal microscopy", Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 1105322 (7 March 2019); https://doi.org/10.1117/12.2511734
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KEYWORDS
Error analysis
Confocal microscopy
Sensors
Algorithm development
Monte Carlo methods
Metrology
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