Non-contact measurement of aspherical and freeform optics with a new confocal tracking profiler

Agustí Pintó; Ferran Laguarta; Roger Artigas; Cristina Cadevall

doi:10.1117/12.896724

21 September 2011 Non-contact measurement of aspherical and freeform optics with a new confocal tracking profiler

Agustí Pintó, Ferran Laguarta, Roger Artigas, Cristina Cadevall

Proceedings Volume 8169, Optical Fabrication, Testing, and Metrology IV; 81690V (2011) https://doi.org/10.1117/12.896724
Event: SPIE Optical Systems Design, 2011, Marseille, France

Abstract

In this paper we introduce a new optical technique for the measurement of aspheric and free-form optics and moulds. This technique, called confocal tracking, consists on tracking the focus on the sample while it is moved along the horizontal XY axes. Unlike all single-point based techniques, confocal tracking images the surface, which makes it possible to determine the best in focus position within every field of view and to correct the residual tracking errors for each measured point. As a result, confocal tracking provides shape measurements with nm-level accuracy and acquisition speeds of 1 mm/s typically. Depending on sample geometry, high NA objectives can be used, with which it is possible to measure slopes as high as 65°. In addition, because confocal tracking is not a single-point but an imaging technique, it is possible to center the surface to be measured with a very quick procedure that can be automated easily. This step may be particularly relevant for optics with symmetry of revolution. The confocal tracking profiler is a proprietary technology of UPC and Sensofar and can be considered the optical equivalent of a high-accuracy contact profiler.

Citation Download Citation

Agustí Pintó, Ferran Laguarta, Roger Artigas, and Cristina Cadevall "Non-contact measurement of aspherical and freeform optics with a new confocal tracking profiler", Proc. SPIE 8169, Optical Fabrication, Testing, and Metrology IV, 81690V (21 September 2011); https://doi.org/10.1117/12.896724

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