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Shazad Paracha
Process Engineer at SAMSUNG Austin Semiconductor LLC
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Publications (3)
Proceedings Article | 20 October 2014 Paper
Increasing reticle inspection efficiency and reducing wafer printchecks at 14nm using automated defect classification and simulation
Shazad Paracha, Eliot Goodman, Benjamin Eynon, Ben Noyes, Steven Ha, Jong-Min Kim, Dong-Seok Lee, Dong-Heok Lee, Sang-Soo Cho, Young Ham, Anthony Vacca, Peter Fiekowsky, Daniel Fiekowsky
Proceedings Volume 9235, 92350Q (2014) https://doi.org/10.1117/12.2070256
KEYWORDS: Inspection, Reticles, Semiconducting wafers, Photomasks, Bridges, Modulation, Lithography, Scanning electron microscopy, Classification systems, Polarization
Proceedings Article | 2 April 2014 Paper
Improved reticle requalification accuracy and efficiency via simulation-powered automated defect classification
Shazad Paracha, Benjamin Eynon, Ben Noyes, Anthony Nhiev, Anthony Vacca, Peter Fiekowsky, Dan Fiekowsky, Young Mog Ham, Doug Uzzel, Michael Green, Susan MacDonald, John Morgan
Proceedings Volume 9050, 905031 (2014) https://doi.org/10.1117/12.2048622
KEYWORDS: Reticles, Semiconducting wafers, Inspection, Photomasks, Classification systems, Scanning electron microscopy, Critical dimension metrology, Error analysis, Wafer testing, Defect detection
Proceedings Article | 23 September 2013 Paper
Evaluation of dry technology for removal of pellicle adhesive residue on advanced optical reticles
Shazad Paracha, Samy Bekka, Benjamin Eynon, Jaehyuck Choi, Mehdi Balooch, Ivin Varghese, Tyler Hopkins
Proceedings Volume 8880, 88800M (2013) https://doi.org/10.1117/12.2030686
KEYWORDS: Adhesives, Reticles, Inspection, Pellicles, Chromium, Semiconducting wafers, Silicon, Ions, Air contamination, Particles
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