Dr. Robert D. Miller Profile

Dr. Robert D. Miller

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Author

Publications (20)

Proceedings Article | 16 April 2011 Paper

Paper

Extending photo-patternable low-κ concept to 193nm lithography and e-beam lithography

Qinghuang Lin, A. Nelson, L. Bozano, P. Brock, S. Cohen, B. Davis, R. Kwong, E. Liniger, D. Neumayer, J. Rathore, H. Shobha, R. Sooriyakumaran, S. Purushothaman, R. Miller, R. Allen, T. Spooner, R. Wisnieff

Proceedings Volume 7972, 79721A (2011) https://doi.org/10.1117/12.881571

KEYWORDS: Dielectrics, Electron beam lithography, Lithography, Photomasks, Silicon, Scanning electron microscopy, Scanners, Copper, Back end of line, Optical lithography

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Proceedings Article | 26 March 2010 Paper

Paper

Multilevel integration of patternable low-κ material into advanced Cu BEOL

Qinghuang Lin, S. Chen, A. Nelson, P. Brock, S. Cohen, B. Davis, N. Fuller, R. Kaplan, R. Kwong, E. Liniger, D. Neumayer, J. Patel, H. Shobha, R. Sooriyakumaran, S. Purushothaman, T. Spooner, R. Miller, R. Allen, R. Wisnieff

Proceedings Volume 7639, 76390J (2010) https://doi.org/10.1117/12.851225

KEYWORDS: Back end of line, Copper, Dielectrics, Optical lithography, Scanning electron microscopy, Silicon, Manufacturing, Semiconducting wafers, Ultraviolet radiation, Polymers

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Proceedings Article | 21 March 2007 Paper

Paper

Self-aligned, self-assembled organosilicate line patterns of ~20nm half-pitch from block-copolymer mediated self assembly

Ho-Cheol Kim, Joy Cheng, Charles Rettner, Oun-Ho Park, Robert Miller, Mark Hart, Linnea Sundström, Ying Zhang

Proceedings Volume 6519, 65191H (2007) https://doi.org/10.1117/12.711687

KEYWORDS: Silicon, Phase modulation, Scanning electron microscopy, Plasma etching, Natural surfaces, Transmission electron microscopy, Oxides, Etching, Thin films, Electron beam lithography

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Proceedings Article | 18 May 1999 Paper

Paper

Novel polymers based on poly(fluorene)s for LED applications

Jeong-Ik Lee, Gerrit Klaerner, Jian Chen, J. Campbell Scott, Robert Miller

Proceedings Volume 3623, (1999) https://doi.org/10.1117/12.348390

KEYWORDS: Polymers, Annealing, Electroluminescence, Absorption, Chlorine, Light emitting diodes, Organic light emitting diodes, Luminescence, Nitrogen, Oxidation

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Proceedings Article | 1 December 1997 Paper

Paper

Femtosecond study of exciton dynamics in polyfluorene statistical copolymers in solutions and thin films

Jin Zhang, Melissa Kreger, Gerrit Klaerner, M. Kreyenschmidt, Robert Miller, J. Campbell Scott

Proceedings Volume 3145, (1997) https://doi.org/10.1117/12.284150

KEYWORDS: Excitons, Polymers, Picosecond phenomena, Absorption, Luminescence, Polarons, Femtosecond phenomena, Molecules, Thin films, Polarization

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Proceedings Article | 29 July 1997 Paper

Paper

Unification of azo-polymer systems by photo-induced molecular movement

Zouheir Sekkat, Andre Knoesen, Wolfgang Knoll, Robert Miller

Proceedings Volume 10290, 102900H (1997) https://doi.org/10.1117/12.279824

KEYWORDS: Polymers, Molecules, Nonlinear optics, Optical storage, Supramolecular assemblies, Silicon, Oxides, Connectors

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Proceedings Article | 5 October 1995 Paper

Paper

Defeating tradeoffs for nonlinear optical chromophores

Christopher Moylan, Robert Miller, Robert Twieg, Victor Lee, I. McComb, Susan Ermer, Steven Lovejoy, Doris Leung

Proceedings Volume 2527, (1995) https://doi.org/10.1117/12.222816

KEYWORDS: Chromophores, Absorption, Polymers, Transparency, Electro optics, Lithium niobate, Electro optic polymers, Bridges, Oscillators, Waveguides

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Proceedings Article | 23 September 1994 Paper

Paper

Recent progress in photorefractive polymers: materials and structures

John Stankus, Scott Silence, Robert Twieg, Donald Burland, Robert Miller, J. Campbell Scott, William Moerner, Gary Bjorklund

Proceedings Volume 2285, (1994) https://doi.org/10.1117/12.187516

KEYWORDS: Polymers, Diffraction, Molecules, Photorefractive polymers, Nonlinear optics, Diffraction gratings, Nondestructive evaluation, Holography, Absorption, Optical tweezers

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Proceedings Article | 23 September 1994 Paper

Paper

Synthesis and characterization of thermally robust electro-optic polymers

Christopher Moylan, Robert Twieg, Victor Lee, Robert Miller, Willi Volksen, John Thackara, C. Walsh

Proceedings Volume 2285, (1994) https://doi.org/10.1117/12.187542

KEYWORDS: Chromophores, Polymers, Electro optics, Nonlinear optics, Electro optic polymers, NOx, Absorption, Lithium niobate, Harmonic generation, Electro optical modeling

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Proceedings Article | 15 May 1994 Paper

Paper

Nonlinear optical chromophores and polymers for practical electro-optic waveguide application

Robert Twieg, Donald Burland, J. Hedrick, Victor Lee, Robert Miller, Christopher Moylan, Charles Seymour, Willi Volksen, C. Walsh

Proceedings Volume 2143, (1994) https://doi.org/10.1117/12.173808

KEYWORDS: Chromophores, Polymers, Nitrogen, NOx, Nonlinear optics, Time division multiplexing, Electro optics, Waveguides, Electro optic polymers, Oxidation

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Proceedings Article | 20 January 1994 Paper

Paper

Thermally stable chromophores and polymers for chi(2) applications

Robert Miller, K. Betterton, Donald Burland, Victor Lee, Christopher Moylan, Robert Twieg, C. Walsh, Willi Volksen

Proceedings Volume 2042, (1994) https://doi.org/10.1117/12.166314

KEYWORDS: Chromophores, Polymers, Nonlinear optics, NOx, Glasses, Absorption, Temperature metrology, Thermal analysis, Electro optics, Electroactive polymers

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Proceedings Article | 20 January 1994 Paper

Paper

Localization of excitations in silicon chains by electron donating side groups

David Smith, Scott Williams, P. Jenkner, Robert Miller, E. Ginsburg, Robin Hochstrasser

Proceedings Volume 2042, (1994) https://doi.org/10.1117/12.166345

KEYWORDS: Luminescence, Absorption, Picosecond phenomena, Silicon, Quantum efficiency, Polymers, Fluorescence spectroscopy, Chemistry, Time resolved spectroscopy, Single photon

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Proceedings Article | 16 December 1993 Paper

Paper

Progress on nonlinear optical chromophores and polymers for practical electro-optic waveguide application

Robert Twieg, K. Betterton, Donald Burland, Victor Lee, Robert Miller, Christopher Moylan, Willi Volksen, C. Walsh

Proceedings Volume 2025, (1993) https://doi.org/10.1117/12.165246

KEYWORDS: Chromophores, Polymers, Nonlinear optics, NOx, Electro optics, Waveguides, Analog electronics, Electro optic polymers, Electroactive polymers, Oxidation

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Proceedings Article | 16 December 1993 Paper

Paper

From electric field-induced second harmonic generation (EFISH) to electro-optic measurements of nonlinear chromophores

Christopher Moylan, Sally Swanson, C. Walsh, John Thackara, Robert Twieg, Robert Miller, Victor Lee

Proceedings Volume 2025, (1993) https://doi.org/10.1117/12.165256

KEYWORDS: Chromophores, Electro optics, Quartz, Polymers, Harmonic generation, Modulators, Electroactive polymers, Dielectrics, Beam splitters, Information operations

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Proceedings Article | 23 July 1993 Paper

Paper

Assessment of polymeric materials for second-harmonic generation and optoelectronic applications

Donald Burland, Robert Miller, Robert Twieg, Willi Volksen, C. Walsh

Proceedings Volume 1852, (1993) https://doi.org/10.1117/12.148439

KEYWORDS: Polymers, Chromophores, Absorption, Second-harmonic generation, Modulators, Waveguides, Complex systems, Glasses, Optoelectronics, Harmonic generation

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Proceedings Article | 25 February 1993 Paper

Paper

Nonlinear optical polymeric waveguide electro-optic phase modulator

Jerome Swalen, Gary Bjorklund, William Fleming, R. Hung, Mark Jurich, Victor Lee, Robert Miller, William Moerner, D. Morichere, Andrew Skumanich, Barton Smith

Proceedings Volume 1775, (1993) https://doi.org/10.1117/12.139215

KEYWORDS: Polymers, Waveguides, Modulators, Electro optics, Nonlinear optics, Electro optic polymers, Organic materials, Chromophores, Electrodes, Polymer thin films

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Proceedings Article | 1 June 1992 Paper

Paper

Surface-imaged silicon polymers for 193-nm excimer laser lithography

Roderick Kunz, Mark Horn, Russell Goodman, Patricia Bianconi, David Smith, J. Eshelman, Gregory Wallraff, Robert Miller, Eric Ginsburg

Proceedings Volume 1672, (1992) https://doi.org/10.1117/12.59738

KEYWORDS: Etching, Oxygen, Polymers, Silicon, Plasma, Reactive ion etching, Chemistry, Ions, Excimer lasers, Lithography

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Proceedings Article | 1 December 1991 Paper

Paper

Determination of the orientational order parameters , in a polysilane LB film via polarization-dependent THG

Dieter Neher, Silvia Mittler-Neher, Myoungsik Cha, George Stegeman, F. Embs, Gerhard Wegner, Robert Miller, C. Grant Willson

Proceedings Volume 1560, (1991) https://doi.org/10.1117/12.50730

KEYWORDS: Polarization, Molecules, Absorption, Polymers, Organic materials, Harmonic generation, Silica, Liquid crystals, Nonlinear optics, Anisotropy

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Proceedings Article | 1 June 1991 Paper

Paper

Polysilanes for microlithography

Gregory Wallraff, Robert Miller, Nicholas Clecak, M. Baier

Proceedings Volume 1466, (1991) https://doi.org/10.1117/12.46372

KEYWORDS: Polymers, Deep ultraviolet, Absorption, Luminescence, Photoresist materials, Lithography, Solid state electronics, Oxygen, Imaging systems, Polymer thin films

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Proceedings Article | 1 August 1990 Paper

Paper

Generation of optical disk servo patterns by lithographic imaging of photodeformable polymers

Phillip Brock, C. Grant Willson, Jerome Swalen, Mark Jurich, Robert Miller, Nicholas Clecak, Anthony Logan, Jean Frechet

Proceedings Volume 1316, (1990) https://doi.org/10.1117/12.22001

KEYWORDS: Servomechanisms, Polymers, Glasses, Optical discs, Photoresist materials, Optical tracking, Plasma display panels, Lithography, Head, Optical storage

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Showing 5 of 20 publications

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