Dr. Zuobin Wang Profile

Dr. Zuobin Wang

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Publications (9)

Proceedings Article | 24 February 2009 Paper

Interference lithography processes with high-power laser pulses

A. Rodriguez, M. Ellman, I. Ayerdi, N. Perez, S. Olaizola, J. Zhang, Z. Ji, T. Berthou, C. Peng, Y. Verevkin, Z. Wang

Proceedings Volume 7201, 72010R (2009) https://doi.org/10.1117/12.808834

KEYWORDS: Lithography, Electron beam lithography, Mirrors, Beam splitters, Optical lithography, Laser processing, Control systems, Photoresist materials, Pulsed laser operation, Laser systems engineering

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Proceedings Article | 12 June 2007 Paper

Formation of 4-beam laser interference patterns for nanolithography

Jin Zhang, Zuobin Wang, Yury Verevkin, Santiago Olaizola, Changsi Peng, Chunlei Tan, Ainara Rodriguez, Eric Daume, Thierry Berthou, Stéphane Tisserand, Ze Ji

Proceedings Volume 6593, 65930I (2007) https://doi.org/10.1117/12.723782

KEYWORDS: Nanotechnology, Lithography, Electron beam lithography, Beam splitters, Optical lithography, Laser applications, Control systems, Scanning probe lithography, Nanolithography, Laser systems engineering

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Proceedings Article | 17 October 2006 Paper

Reference pattern-based 2D measurement with nano resolution

Zuobin Wang, Shizhong Su, Yury Konstantinovich Verevkin, Sergej Fatikow

Proceedings Volume 6376, 63760M (2006) https://doi.org/10.1117/12.685924

KEYWORDS: Packaging, Nanotechnology, Lithography, Fringe analysis, Optical lithography, Statistical analysis, Image processing, Manufacturing, Scanning electron microscopy, 193nm lithography

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Proceedings Article | 13 June 2001 Paper

Analysis of oblique fringes by fringe pattern matching

Zuobin Wang, Chenggen Quan, Peter Bryanston-Cross

Proceedings Volume 4317, (2001) https://doi.org/10.1117/12.429564

KEYWORDS: Fringe analysis, Statistical analysis, Speckle, Image processing, Computer simulations, Systems engineering, Mechanical engineering, Product engineering, Astatine, Phase shifts

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Proceedings Article | 17 September 1997 Paper

Two methods for achieving subpixel resolution in phase difference determination by fringe pattern matching

Zuobin Wang, Peter Bryanston-Cross, Duc-Truong Pham

Proceedings Volume 3098, (1997) https://doi.org/10.1117/12.281168

KEYWORDS: Mirrors, Fringe analysis, Imaging systems, Interferometers, Image resolution, Computer simulations, Optical interferometry, Spatial resolution, Phase measurement, Phase shifts

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SPIE Journal Paper | 1 September 1997

Effect of image patch size on phase difference determination by fringe pattern matching

Zuobin Wang, Peter Bryanston-Cross, David Whitehouse

OE, Vol. 36, Issue 09, (September 1997) https://doi.org/10.1117/12.10.1117/1.601473

KEYWORDS: Fringe analysis, Phase measurement, Image processing, Computer simulations, Speckle, Phase shifts, Interferometry, Imaging systems, Interferometers, Superposition

Proceedings Article | 18 September 1996 Paper

Displacement measurement based on Young's experiment

Zuobin Wang, Peter Bryanston-Cross, Hongwei Long

Proceedings Volume 2782, (1996) https://doi.org/10.1117/12.250812

KEYWORDS: Fringe analysis, Fiber optics, Interferometers, Computing systems, Image resolution, Computer simulations, Machine vision, Fiber optics tests

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Proceedings Article | 19 August 1996 Paper

Phase-shifting interferometry with precise phase steps

Zuobin Wang, Peter Bryanston-Cross, Richard Davies

Proceedings Volume 2775, (1996) https://doi.org/10.1117/12.246772

KEYWORDS: Fringe analysis, Image resolution, Phase shift keying, Computer simulations, Phase interferometry, CCD cameras, Turbulence, 3D metrology, Phase measurement, Phase shifts

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SPIE Journal Paper | 1 August 1996

Phase-shifted image matching algorithm for displacement measurement

Zuobin Wang, M. Graca, Peter Bryanston-Cross, David Whitehouse

OE, Vol. 35, Issue 08, (August 1996) https://doi.org/10.1117/12.10.1117/1.600808

KEYWORDS: Fringe analysis, Phase shifts, Sensors, Interferometers, Fiber optics, Phase measurement, Signal to noise ratio, Fiber optics tests, Calibration, Interferometry

Showing 5 of 9 publications

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