Ms. Zhaohui Karen Huang Profile

Zhaohui Karen Huang

Project Manager at Intel Corp

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Publications (3)

Proceedings Article | 10 May 2005 Paper

Application of scatterometry for evaluation of lithographic process and OPC model generation

Karen Huang, Joungchel Lee, Youxian Wen, Jon Opsal

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.600183

KEYWORDS: Scatterometry, Optical proximity correction, Scanning electron microscopy, Data modeling, Scatter measurement, Semiconducting wafers, Process modeling, Lithography, Calibration, Time metrology

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Proceedings Article | 24 May 2004 Paper

Methods for evaluating lithographic performance of exposure tools for the 45-nm node: ECD and scatterometry

Karen Huang, Bryan Rice, Brian Coombs, Regina Freed

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.536062

KEYWORDS: Single crystal X-ray diffraction, Semiconducting wafers, Critical dimension metrology, Lithography, Scanning electron microscopy, Metrology, Scatterometry, Wafer testing, Scanners, Oxides

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Proceedings Article | 8 December 1995 Paper

Manufacturing and inspection of OPC and PSM masks

Wolfgang Staud, Karen Huang, Patricia Beard, Ofer Hebron, Yair Eran

Proceedings Volume 2621, (1995) https://doi.org/10.1117/12.228214

KEYWORDS: Inspection, Transmittance, Photomasks, Optical proximity correction, Opacity, Manufacturing, Phase measurement, Databases, Defect detection, Phase shifts

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