We present a snapshot, adaptive null interferometric system for measuring freeform surfaces using deformable mirror as the null corrector to increase the measurement range. To compensate the wavefront for different surfaces, a computer controlled deformable mirror is used as an adaptive wavefront corrector. A deformable mirror control algorithm based on stochastic parallel gradient descent algorithm has been developed to drive the deformable mirror to null the interference fringe. Snapshot phase measurement is proposed in the optimization progress to increase the iterative speed. The surface shape of the deformable mirror is measured by a deflectometry system to calculate the shape of the surface under test.
We present a dual-mode snapshot interferometric system (DMSIS) for measuring both surface shape and surface roughness to meet the urgent need for on-machine metrology in optical fabrication. Two different modes, interferometer mode and microscopy mode, are achieved using Linnik configuration. To realize snapshot measurement, a pixelated polarization camera is used to capture four phase-shifted interferograms simultaneously. We have demonstrated its performance for off-line metrology and on-machine metrology by mounting it on a diamond turning machine.
Diamond turning is the powerful fabrication method for optics. Current process is very time consuming due to the lack of on-machine metrology. In this talk, we will first discuss the challenges and requirement of in-situ metrology, then we will present chromatic confocal on-machine metrology system developed in our lab and demonstrate its performance.
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