Mr. Yi Gan Profile

Yi Gan

at Wuhan Rrch Inst Post & Telecom

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 31 January 2005 Paper

Applications of ICP in optoelectronic device fabrication

Yi Gan, Jun Zhang, Shan Jiang, Xiaodong Huang, Ning Zhou, Ligang Deng

Proceedings Volume 5624, (2005) https://doi.org/10.1117/12.575729

KEYWORDS: Etching, Chlorine, Photomasks, Scanning electron microscopy, Optoelectronic devices, Dry etching, Ions, Vertical cavity surface emitting lasers, Reactive ion etching, Anisotropic etching

Read Abstract +

Proceedings Article | 12 May 2004 Paper

Angled stripe InGaAsP/InP SLED fabricated by low- damage inductively coupled plasma dry etching

Jun Zhang, Xiaodong Huang, Jin Chang, Yingjun Liu, Yi Gan, Linsong Li, Dingli Wang, Tao Liu, Shan Jiang, Ligang Deng

Proceedings Volume 5280, (2004) https://doi.org/10.1117/12.523504

KEYWORDS: Dry etching, Etching, Plasma, Reactive ion etching, Antireflective coatings, Chlorine, Metalorganic chemical vapor deposition, Ions, Plasma etching, Wet etching

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years