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Dr. Yehiel Gotkis
Senior Principal Engineer at KLA-Tencor Corp
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Publications (1)
Proceedings Article | 1 April 2009 Paper
Resist roughness bi-modality as revealed by two-dimensional FFT 2D analysis
Yehiel Gotkis, Leonid Baranov, Theodore Fedynyshyn, Susan Cann
Proceedings Volume 7273, 727345 (2009) https://doi.org/10.1117/12.813842
KEYWORDS: Polymers, Line edge roughness, Atomic force microscopy, Surface roughness, Profiling, Distortion, Photoresist processing, Statistical analysis, Shape analysis, Modulation
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