Mr. Jonathan Yannuzzi Profile

Jonathan Yannuzzi

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Publications (2)

SPIE Journal Paper | 31 January 2023

Probabilistic process window: a new approach to focus-exposure analysis

Chris Mack, Jonathan Yannuzzi, Gian Lorusso, Mohamed Zidan, Danilo De Simone, Ataklti Weldeslassie, Nadia Vandenbroeck, Philippe Foubert, Christophe Beral, Anne-Laure Charley

JM3, Vol. 22, Issue 02, 021007, (January 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.2.021007

KEYWORDS: Metrology, Error analysis, Measurement uncertainty, Line width roughness, Electroluminescence, Semiconducting wafers, Lithography, Scanning electron microscopy, High volume manufacturing, Scanners

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Proceedings Article | 26 May 2022 Presentation + Paper

Probabilistic process window: a new approach to focus-exposure analysis

Chris Mack, Jonathan Yannuzzi, Gian Lorusso, Mohamed Zidan, Danilo De Simone, Ataklti Weldeslassie, Nadia Vandenbroeck, Philippe Foubert, Christophe Beral, Anne-Laure Charley

Proceedings Volume 12053, 1205307 (2022) https://doi.org/10.1117/12.2614445

KEYWORDS: Metrology, Line width roughness, Lithography, Error analysis, Scanning electron microscopy, Scanners, Critical dimension metrology, Statistical analysis

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