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Dr. Yannick Guyot
at Institut Lumière Matière
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Publications (1)
Proceedings Article | 18 June 2024 Presentation + Paper
Process optimization for waveguide fabrication by liftoff processing in layers deposited by pulsed laser
A. Bernard, A. Pereira, R. Orobtchouk, Etienne Cleyet-Merle, Christian Grillet, N. Chauvin, S. Guy, Y. Guyot, A. Gassenq
Proceedings Volume 13012, 130120K (2024) https://doi.org/10.1117/12.3014379
KEYWORDS: Waveguides, Annealing, Lithography, Laser processing, Pulsed laser deposition, Etching, Aluminum, Pulsed laser operation, Photoresist materials, Photoluminescence
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