Dr. Won-Young Chung Profile

Dr. Won-Young Chung

at SAMSUNG Electronics Co Ltd

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Publications (2)

Proceedings Article | 14 May 2004 Paper

Simulation technique for the PR flow process using a new viscous flow model

Won-Young Chung, Tai-Kyung Kim, Jin-Young Yoon, Hyun-Woo Kim, Young-Kwan Park, Jeong-Taek Kong

Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.534809

KEYWORDS: Optical lithography, Lithography, Interfaces, Temperature metrology, 3D modeling, Calibration, Scanning electron microscopy, Resolution enhancement technologies, Thermal modeling, Electron microscopes

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Proceedings Article | 26 June 2003 Paper

Hybrid PPC methodology using multistep correction and implementation for the sub-100-nm node

Soo-Han Choi, Ji-Soong Park, Chul-Hong Park, Won-Young Chung, In-sung Kim, Dong-Hyun Kim, Yoo-Hyon Kim, Moon-Hyun Yoo, Jeong-Taek Kong

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485397

KEYWORDS: SRAF, Etching, Critical dimension metrology, Logic devices, Process control, Process modeling, Semiconductors, Control systems, Plasma, Instrument modeling

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