Mr. William C. Peterson Profile

William C. Peterson

at JPMorgan Securities

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Publications (2)

Proceedings Article | 11 June 1999 Paper

Considerations for the use of application-specific photoresists

John Sturtevant, Benjamin Ho, Kevin Lucas, John Petersen, Chris Mack, Edward Charrier, William Peterson, Nobu Koshiba, Gregg Barnes

Proceedings Volume 3678, (1999) https://doi.org/10.1117/12.350217

KEYWORDS: Photoresist materials, Photoresist processing, Deep ultraviolet, Metals, Logic, Photoresist developing, Phase shifts, Manufacturing, Chemistry, Transparency

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Proceedings Article | 29 June 1998 Paper

Comparisons of critical parameters for high- and low-activation-energy deep-UV photoresists

Will Conley, Carl Babcock, Nigel Farrar, Hua-Yu Liu, Bill Peterson, Kazuo Taira

Proceedings Volume 3333, (1998) https://doi.org/10.1117/12.312425

KEYWORDS: Photoresist materials, Chemistry, Etching, Lithography, Manufacturing, Deep ultraviolet, Silicon, Microelectronics, Resistance, Metals

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