Dr. Tobias Seifert Profile

Dr. Tobias Seifert

at Fraunhofer-ENAS

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 15 March 2023 Poster + Paper

Wafer-level vacuum packaged translatory MEMS mirror with large stroke for compact NIR-FT spectrometers

Thilo Sandner, Eric Gaumont, Thomas Graßhoff, Andreas Rieck, Tobias Seifert, Gerald Auböck, Jan Grahmann

Proceedings Volume 12434, 124340X (2023) https://doi.org/10.1117/12.2668624

KEYWORDS: Deformable mirrors, Semiconducting wafers, Protactinium, Deformation

Read Abstract +

A translatory MOEMS actuator is presented, which enables a precise out-of-plane translatory oscillation of a 5mm mirror with 700 μm large stroke at 267Hz, when driven at 4V in parametric resonance. Due to significant gas damping operation in vacuum is needed. The minimum requirements on vacuum pressure (pmax ≥ 3.21 Pa, Q ≥ 1177) were determined experimentally. Therefore, the MOEMS are permanently encapsulated by means of a wafer-level-vacuum package. The hermetic sealing of MEMS WLVP (stack of 4 wafer 6”) was realized by glass-frit bonding (i) to be compatible to MEMS process AME75 and (ii) to avoid any (vertical) TWI. The ductile glass frit bond layer allows hermetic sealing also on non-ideal wafer topologies with height differences of several 100 nm. But high process temperatures of 435°C are required. Despite the high process temperatures (430°C needed for glass frit bonding) a sufficient static mirror planarity of ≤ λ/10 was achieved. The paper will discuss details of VWLP development and MEMS system integration. The longterm stability of 0.1 Pa inner vacuum pressure was successfully tested to be < 10a using a Ne fine leakage test. For system integration into a miniaturized FT-NIR spectrometer selected MEMS with minimal tilt were used. The NIR-FTS achieved a spectral resolution of 8.3 cm^-1 and SNR ≤ 8000 (with co-adding of 1000 spectra). The new translatory MEMS are very promising for compact FTS. The versatility and ruggedness of a MOEMS-FTS makes it ideal for process control in harsh environments (e.g. surveillance of fast chemical reactions).

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years