Dr. Tiecheng Zhou Profile

Dr. Tiecheng Zhou

at Applied Materials Inc

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Publications (2)

Proceedings Article | 11 May 2009 Paper

Plasma optical emission analysis for chamber condition monitor

Zhigang Mao, Tiecheng Zhou, Michael Grimbergen, Darin Bivens, David Knick, Renee Koch, Madhavi Chandrachood, Jeff Chen, Ibrahim Ibrahim, Ajay Kumar

Proceedings Volume 7379, 73791U (2009) https://doi.org/10.1117/12.824306

KEYWORDS: Plasma, Etching, Oxygen, Chromium, Chlorine, Atmospheric plasma, Spectroscopy, Photomasks, Phase modulation, Contamination

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Proceedings Article | 11 May 2009 Paper

In situ selectivity monitor for dry etch of photomasks

Tiecheng Zhou, Jeff Chen, Michael Grimbergen, Madhavi Chandrachood, Ibrahim Ibrahim, Ajay Kumar

Proceedings Volume 7379, 73791T (2009) https://doi.org/10.1117/12.824305

KEYWORDS: Etching, Chromium, Photomasks, Dry etching, Photoresist processing, Algorithm development, Plasma, Refractive index, Quartz, Photoresist materials

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