Mr. Thomas Yang Profile

Thomas Yang

at Semiconductor Manufacturing International Corp

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Author

Publications (3)

Proceedings Article | 30 March 2017 Presentation + Paper

Transforming information from silicon testing and design characterization into numerical data sets for yield learning

Thomas Yang, Yang Shen, Yifan Zhang, Jason Sweis, Ya-Chieh Lai

Proceedings Volume 10148, 101480W (2017) https://doi.org/10.1117/12.2259950

KEYWORDS: Failure analysis, Diagnostics, Silicon, Semiconducting wafers, Defect detection, Process engineering, Diagnostic tests, Product engineering, Data processing, Yield improvement, Electrical breakdown, Signal detection

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Proceedings Article | 30 March 2017 Paper

Electrical failure debug using interlayer profiling method

Thomas Yang, Yang Shen, Yifan Zhang, Jason Sweis, Ya-Chieh Lai

Proceedings Volume 10148, 101481D (2017) https://doi.org/10.1117/12.2259944

KEYWORDS: Electrical breakdown, Profiling, Failure analysis, Structural design, Manufacturing, Inspection, Multilayers, Data analysis, Data modeling, Measurement devices, Statistical analysis

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Proceedings Article | 30 March 2017 Paper

Using design differentiating methods to find suspect design patterns which cause failure

Yang Shen, Thomas Yang, Yifan Zhang, Jason Sweis, Ya-Chieh Lai

Proceedings Volume 10148, 101481C (2017) https://doi.org/10.1117/12.2259947

KEYWORDS: Failure analysis, Diagnostic tests, Diagnostics, Product engineering, Semiconducting wafers, Electrical breakdown, Defect detection, Structural design, Manufacturing, Optical proximity correction

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