Pedro Ortiz, Neil Keegan, Julia Spoors, John Hedley, Alun Harris, Jim Burdess, Richard Burnett, Thomas Velten, Margit Biehl, Thorsten Knoll, Werner Haberer, Matthew Solomon, Andrew Campitelli, Calum McNeil
A microfluidic system for cancer diagnostics based around a core MEMS biosensor technology is presented in this
paper. The principle of the MEMS biosensor is introduced and the functionalisation strategy for cancer marker
recognition is described. In addition, the successful packaging and integration of functional MEMS biosensor devices are
reported herein. This ongoing work represents one of the first hybrid systems to integrate a PCB packaged silicon
MEMS device into a disposable microfluidic cartridge.
We present a sophisticated method for the packaging of a micro-electro-mechanical biochip, which leaves the sensitive
surface area of the chip uncovered to allow for direct contact to aqueous environment. Together with adequate
integration in a fluidic cartridge, the packaging method allows for the realization of a lab-on-chip (LOC). A fluidic
interface to the cartridge is provided as well as electrical interfaces to the biochip electronics located in a readout
instrument. The biochip features a central membrane and electrodes, both located in the central chip area, and bond pads
distributed along the rim of the chip. The packaging method ensures a hermetic separation between the membrane
sensing area interfaced to liquids and the bond pad area. Challenging was the fact that both, the freely moving membrane
and the bond pads for electrical interconnection are positioned very close to each other on the same chip surface area.
We mounted the biochip into a recess of a rigid printed circuit board and electrically connected it to the latter with a
proprietary MicroFlex Interconnection (MFI) technology. A customized coating method using a specially shaped silicone
casting-mold ensured a very thin, hermetic encapsulation, which left the membrane safe and freely accessible.
Pedro Ortiz, Neil Keegan, Julia Spoors, John Hedley, Alun Harris, Jim Burdess, Richard Burnett, Thomas Velten, Margit Biehl, Thorsten Knoll, Werner Haberer, Matthew Solomon, Andrew Campitelli, Calum McNeil
A microfluidic system for cancer diagnosis based around a core MEMS biosensor technology is presented in this
paper. The principle of the MEMS biosensor is introduced and the functionalisation strategy for cancer marker
recognition is described. In addition, the successful packaging and integration of functional MEMS biosensor devices are
reported herein. This ongoing work represents one of the first hybrid systems to integrate a PCB packaged silicon
MEMS device into a disposable microfluidic cartridge.
Sub-80nm, sub-wavelength multiphoton nanoprocessing of silicon wafers as well as 3D maskless lithography by two
two-photon polymerization in combination with five-dimensional (x,y,z, λ, τ) multiphoton analysis have been
performed with the compact near infrared MHz femtosecond laser galvoscanning microscope FemtoCut (JenLab
GmbH) as well as a modified ZEISS LSM510-NLO system. Laser excitation radiation was provided by a tuneable turnkey,
one-box Chameleon as well as a MaiTai Ti:sapphire laser oscillator. Nanostructuring of silicon wafers with oil
immersion objectives was based on NIR laser-induced periodic surface structures (LIPPS) likely due to selforganization
processes. For the first time, periodic 70nm nanogrooves have been generated in wafers which is one order
below the 800 nm laser wavelength by multiphoton phenomena at TW/cm2 transient intensities and low sub-3nJ pulse
energies. Three-dimensional two-photon polymerization in SU-8 photoresists at GW/cm2 allowed rapid prototyping
with sub-200nm precision. The same intensities have been used to image endogenous and exogenous fluorophores in a
variety of materials for target finding and the evaluation of the nanoprocessing procedures.
For the first time, sub-100 nm nanostructuring as well as five-dimensional (5D) multiphoton analysis with submicron spatial resolution, 270 ps temporal resolution and 10 nm spectral resolution have been performed on metal films, semiconductors, polymers and biological tissues using near infrared, 80/90 MHz femtosecond laser pulses at <3nJ pulse energy. A compact (65x62x48 cm3) multiport laser scanning microscope FemtoCut (JenLab GmbH) equipped with fast detectors for time-correlated single photon counting and a Sagnac interferometer for spectral imaging as well as the ZEISS laser scanning microscope LSM 510 Meta-NLO have been employed. Laser excitation radiation was provided by a tuneable turn-key, one-box Chameleon as well as a MaiTai Ti:sapphire laser oscillator. We were able to perform precise multiphoton nanopatterning of gold films, photoresists and polymers with submicron (cut) sizes. Interestingly, sub-80 nm laser-induced periodic surface structures (LIPPS) have been created in silicon wafers and used to produce nanostructured 2D silicon arrays.
In this paper a new concept for a micro coil for the realization of a displacement sensor or angular sensor is presented. The sensor consists of a 3D coil, consisting of two half coils and a movable iron core. Though the coil is fabricated by means of silicon bulk micromachining, it is possible to move an iron core through the coil without destroying the windings. The inductance of the coil is 0.25 (mu) H without core and 7.2 (mu) H with core. The ohmic resistance has a value of 60 (Omega) . The sensors developed are used in gesture recognition. For this application several micro coils are mounted on a data glove. The sensors have the task to measure the flexion of fingers.
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