We present the design, manufacturing and characterization results of a customized high-resolution echelle grating. The grating was manufactured at Fraunhofer IOF and delivered to the NIRPS (Near Infrared Planet Searcher Instrument) consortium. The technology workflow for the manufacturing of the echelle grating is relying on wet-chemical etching, applied to crystalline silicon substrates, which enables the creation of highly determined micro-facets and surfaces over macroscopic dimensions. The echelle’s grating period and plateau size within one period are established based on electron-beam lithography. A binary pattern in a hard mask material is performed by dry-reactive ion etching while transferring the pattern in the silicon substrate is achieved by wet-chemical etching with potassium hydroxide. The grating is designed to operate at a blaze angle of 76° in a wavelength band of 0.9μm – 1.8μm. A gold coating is applied to increase the diffraction efficiency to about 70%; verified at wavelengths of 1030nm and 1640nm, respectively. The overall grating size is 78mm x 284mm providing a WFE of less than 70nm (RMS) measured throughout the full aperture. In this article we present the manufacturing workflow and structural inspection results of the manufactured echelle grating, having a critical eye on the impact of sub-surface defects of the initial silicon crystal. Moreover, we present optical performance test results covering diffraction efficiency, PSF, WFE and spectral ghosts. It is concluded that the imaging properties of the manufactured grating are as good as those of a plane gold mirror reference. Additional presentation content can be accessed on the supplemental content page. Additional presentation content can be accessed on the supplemental content page.
The development of a small size prototype of a UV-grating for the CUBES instrument of ESO’s VLT is presented. It has a line density of 3600 l/mm and is manufactured on a fused-silica substrate using electron-beam lithography, reactive ion etching and atomic layer deposition. In the ideal case the grating has a pure lamellar profile with a groove width in the range of 100nm only. To achieve a high polarization independent diffraction efficiency the grating depth is required to be in the range of 700nm and the duty cycle needs to be met with an accuracy in the nm-range. To achieve this high aspect ratio with sufficient accuracy a trimming process based on a conformal overcoating by ALD is performed.
The highly aspheric secondary mirror M2 of ESO’s Extremely Large Telescope (ELT) is the largest convex mirror ever polished. We report on manufacturing and error analysis of the high accuracy computer-generated hologram (CGH) used as part of the test concept for the M2 mirror. In order to comply with the required measurement accuracies in the single nanometer range (RMS), existing error sources along the entire process chain need to be considered. Available characterization methods for measurement of fabrication errors are described, as well as modelling of wavefront errors resulting from the CGH manufacturing process itself. Additionally, a general approach to improve the transmission of CGHs applying an effective multi-level patterning realized by binary sub-wavelength structures is introduced.
We present our progress on the UV-VIS arm of Son Of X-Shooter (SOXS), a new spectrograph for the NTT. Our design splits the spectral band into four sub-bands that are imaged onto a single detector. Each band uses an optimized high efficiency grating that operates in 1st order (m=1). In our previous paper we presented the concept and preliminary design. SOXS passed a Final Design Review in July 2018 and is well into the construction phase. Here we present the final design, performances of key manufactured elements, and the progress in the assembly. Based on the as-built elements, the expected throughput of the visual arm will be < 55%. This paper is accompanied by a series of contributions describing the progress made on the SOXS instrument.
An Èchelle-grating specifically developed for the space borne measurement of earth’s atmospheric CO2-concentration is presented. It has a line density of ~170L/mm and is manufactured on a thick crystalline silicon substrate using electron beam lithography. The echelle profile is realized using a highly anisotropic chemical etching process, which stops on the <111> crystallographic planes of the crystal. The established manufacturing process allows perfect linear grating facets with negligible corner rounding of the profile. The important property of showing a low polarization sensitivity of the diffraction efficiency is achieved by a special design and technology for applying the gold coating of the grating which intentionally leaves one grating facet uncoated.
Here, we report on the approach of realizing an all-fused-silica PGP disperser (prism + grating + prism) by low temperature direct bonding. A surface relief grating with period 660nm and overall depth of approximately 2000nm is sandwiched between two equal prisms. Direct bonding of glass relies on the formation of covalent bonds between hydrophilic silicon-oxide surfaces. Compared to other joining technologies, like adhesive bonding or optical contacting, the established connection is stiff, shows no outgassing, is highly resistant against chemical and radiative degradation and the established optical interface is intrinsically impedance-matched. In summary, two prototypes were realized, optically characterized and successfully underwent environmental testing. The overall diffraction efficiency of the PGP is larger than 90%.
We report on the design and fabrication of a reflection grating for hyperspectral applications operating in the range from 340 nm to 1040 nm wavelength. The blazed grating is based on an effective medium approach, where the desired functionality is realized using a binary surface relief structure. For each period, a gradient in size of the local grating features mimics an interface which adds a linear phase profile to the illuminating beam – thus introducing diffraction. The surface relief structure is composed of 2D structures - pillars with diameters from 200 nm to 350 nm to voids with diameters from 300nm to 120 nm. Overall, an entire number of ~50 such features are arranged to establish an overall unit cell of the grating over a length of 30 μm. By purposeful design of size, shape and arrangement of the sub-wavelength features such gratings offer novel opportunities in tailoring the spectral response, i.e. particular broadband efficiency or the enhancement of the efficiency in specific sub-domains of the spectrum. We will present measured performance results of a grating covering a circular area of 80mm in diameter manufactured on a 4inch-wafer. Finally, we will give an outlook on how such structures can be applied to curved surfaces and even ultra-broadband operation.
Surface relief gratings are well-established elements for high power laser applications, e.g. ultra-short pulse compression. A binary submicron period profile, realized by e-beam lithography and reactive ion beam etching in a dielectric material, is utilized for nearly one-hundred percent diffraction efficiency. Because these gratings are manufactured without any replication techniques, a high wave front accuracy and a low stray light background can be achieved. Spectroscopic applications require additional properties, i.e. a larger spectral bandwidth and Off-Littrow operation. We present new approaches for surface relief gratings realized either via multi-level staircase profiles or exploiting sub-wavelength features. The RVS spectrometer grating in ESA’s GAIA mission is a prominent example where these techniques are already in use. The current contribution focuses on the results achieved during a pre-development performed for the MOONS instrument intended to operate at VLT.
Massively multiplexed spectroscopic stellar surveys such as MSE present enormous challenges in the spectrograph design. The combination of high multiplex, large telescope aperture, high resolution (R~40,000) and natural seeing implies that multiple spectrographs with large beam sizes, large grating angles, and fast camera speeds are required, with high cost and risk. An attractive option to reduce the beam size is to use Bragg-type gratings at much higher angles than hitherto considered. As well as reducing the spectrograph size and cost, this also allows the possibility of very high efficiency due to a close match of s and p-polarization Bragg efficiency peaks. The grating itself could be a VPH grating, but Surface Relief (SR) gratings offer an increasingly attractive alternative, with higher maximum line density and better bandwidth. In either case, the grating needs to be immersed within large prisms to get the light to and from the grating at the required angles. We present grating designs and nominal spectrograph designs showing the efficiency gains and size reductions such gratings might allow for the MSE high resolution spectrograph.
In recent years, the scattering properties of optical gratings became of high interest. In particular, the effect of line edge roughness (LER) in lamellar diffraction gratings was identified to be a potential source of stray light. In this contribution the LER-induced scattering spectrum of such gratings is investigated. The straight-forward method to calculate the angle resolved scattering (ARS) is offered by two-dimensional simulation tools, e.g. the rigorous coupled wave analysis (RCWA). Unfortunately, this approach suffers from computation times that
typically lie in the range of several days. As a simplification, we apply a novel one-dimensional rigorous approach1 that permits the prediction of ARS along the dispersion direction of the grating within a feasible computation
time. As the 1D-model only accounts for the LER-parameter σ and neglects the correlation length ξ and the roughness exponent α, analytical considerations must be employed in order to adapt the 1D-simulation results to the 2D-reality.1 The model is verified by comparison to the 2D-model and ARS-measurements of E-beam exposed gratings with artificially induced (and strongly determined) LER. Based on the derived 1D-model, the effects of
different parameters on the straylight performance of a high performance spectrometer grating is investigated. As a result we find that not only the roughness parameters but also the grating geometry has a significant effect especially on the spatial distribution of the scattered light. In other words, the strength of the scattered light next to the (spectrometric) useful diffraction order can be controlled by the grating geometry, too. Hence, the presented algorithm might be a useful tool for designing gratings with strong straylight specifications.
By uniting a grating with a prism to a GRISM compound, the optical characteristics of diffractive and refractive elements can be favorably combined to achieve outstanding spectral resolution features. Ruling the grating structure into the prism surface is common for wavelengths around 1 μm and beyond, while adhesive bonding of two separate parts is generally used for shorter wavelengths and finer structures. We report on a manufacturing approach for joining the corresponding glass elements by the technology of hydrophilic direct bonding. This allows to manufacture the individual parts separately and subsequently combine them quasimonolithically by generating stiff and durable bonds of vanishing thickness, high strength and excellent transmission. With this approach for GRISM bonding, standard direct-write- or mask-lithography equipment may be used for the fabrication of the grating structure and the drawbacks of adhesive bonding (thermal mismatch, creep, aging) are avoided. The technology of hydrophilic bonding originates from “classical” optical contacting [1], but has been much improved and perfected during the last decades in the context of 3-dimensinal stacking Si-wafers for microelectronic applications [2]. It provides joins through covalent bonds of the Si-O-Si type at the nanometer scale, i.e. the elementary bond type in many minerals and glasses. The mineral nature of the bond is perfectly adapted to most optical materials and the extremely thin bonding layers generated with this technology are well suited for transmission optics. Creeping under mechanical load, as commonly observed with adhesive bonding, is not an issue. With respect to diffusion bonding, which operates at rather high temperatures close to the glass transition or crystal melting point, hydrophilic bonding is a low temperature process that needs only moderate heating. This facilitates provision of handling and alignment means for the individual parts during the set-up stages and greatly eases joining optical materials of different thermal expansion. The technology has been successfully used in the past for bonding various glasses as well as crystalline optical materials [3, 4]. Here we will focus on bonding prisms elements and binary gratings of fused silica with and without coatings at the bonding interface. Further, preliminary results on bonding prism-grating-prism (PGP) combinations will be presented.
In the frame of ESA‘s earth-observation program “Copernicus”, the Fraunhofer IOF develops for the Sentinel-4/UVN spectrometer, the optical gratings for the near-infrared spectral channel together with its isostatic mounts.
A hyperspectral imaging spectrometer covering the wavelength range from 420 nm to 1000 nm is designed for the purpose of monitoring Earth’s environmental change. It has an entrance slit length of 24 μm, f/# of 3, smile and keystone distortion smaller than 20% of the pixel pitch and a spectral resolution of 6.5 nm. We design and review thirteen systems including one Offner system, two Schwarzschild systems and ten TMA systems for such specifications. Freeform surface and aspheric surface are used in some of the systems to achieve the required system parameters. With all system performance being summarized and evaluated, advantages and disadvantages of three different system types are compared. We down select two systems for further fine adjustments and tolerancing analysis. Final systems with superior performance and detailed tolerancing analysis are given at the end.
We report about our latest achievements to realize the diffraction gratings during the development activities for a future Earth observation high resolution spectrometer studied by ESA. The gratings are manufactured by electron beam lithography on fused silica substrates. The optical performance is considerably increased by applying a dedicated high refractive index coating to the grating structure using atomic layer deposition (ALD). Thus, we were able to achieve diffraction efficiencies larger than 75% averaged over both linear polarizations states, i.e. TE and TM. At the same time, the polarization sensitivity is well below 10% in both cases. Finally, the diffraction gratings for the SWIR-1 spectral channel were bonded on a massive prism substrate in order to realize a GRISM element. This process was achieved by direct fused silica bonding performed under atmospheric pressure within special mechanical equipment designed and constructed particularly for this purpose.
Any violation of the periodicity of a perfect grating will result in diffuse scattering. In the particular case of a periodic violation the generated stray light shows deterministic, also periodic features that arise as distinct peaks in the stray light spectra, especially so-called Rowland ghosts. In this paper the characteristics of the spurious Rowland ghosts in binary spectrometer gratings are investigated and the potential of a randomization technique in order to suppress the Rowland ghosts is analyzed. Especially in sequential fabrication technologies, e.g. electron beam lithography, the Rowland ghosts originate in a segmentation process that is necessary in order to write large scale gratings. Hence several subareas are subsequentially exposed and stitched together leading to the final full size grating. Due to this stitching approach the subareas induce secondary periodic structures and thus generate the spurious Rowland ghosts in the order of magnitude of <10-4 compared to the useful diffraction order. A randomization of this segmentation process is investigated both theoretically in rigorous simulations and experimentally by fabricating a purposely designed optical grating. As approach for the randomization in experiment we applied a special multi-pass-exposure. Here the sample is exposed multiple times with an accordingly shifted and dose-reduced subarea in each pass. The achieved simulation results show that a randomization of the subareas effectively reduces the Rowland ghosts. Furthermore the applied randomization technique during grating fabrication was able to suppress one kind of Rowland ghosts completely.
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