Dr. Teng Wang Profile

Dr. Teng Wang

at HMI

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Publications (2)

Proceedings Article | 26 March 2019 Paper

Analyze line roughness sources using power spectral density (PSD)

Lingling Pu, Teng Wang, Thomas Huisman, Ruben Maas, Maikel Goosen, Harm Dillen, Philippe Leray, Wei Fang

Proceedings Volume 10959, 109592W (2019) https://doi.org/10.1117/12.2516570

KEYWORDS: Scanning electron microscopy, Line edge roughness, Semiconducting wafers, Monte Carlo methods, Image segmentation, Semiconductors, Extreme ultraviolet, Optical simulations, Solids, Metrology

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Proceedings Article | 26 March 2019 Paper

An optimized parameter guidance system for line/space CD metrology

Nan Zhao, Lingling Pu, Teng Wang, Wentian Zhou, Ming Xu, Wei Fang, Brian Lee

Proceedings Volume 10959, 1095923 (2019) https://doi.org/10.1117/12.2515021

KEYWORDS: Scanning electron microscopy, Metrology, Critical dimension metrology, Computer simulations, Imaging systems, Image quality, Monte Carlo methods, Detection and tracking algorithms, Model-based design, Image analysis

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