Dr. Tadayuki Sugimori Profile

Dr. Tadayuki Sugimori

at NuFlare Technology Inc

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Author

Publications (3)

Proceedings Article | 29 September 2021 Presentation

Study of high throughput EUV mask pattern inspection technologies using multi e-beam optics

Tadayuki Sugimori, Riki Ogawa, Hidekazu Takekoshi, John Hartley, David Pinkney, Atsushi Ando, Koichi Ishii, Chosaku Noda, Nobutaka Kikuiri

Proceedings Volume 11855, 118550C (2021) https://doi.org/10.1117/12.2600987

KEYWORDS: Inspection, Extreme ultraviolet, Photomasks, Optical inspection, Optics manufacturing, EUV optics, Wafer-level optics, Image processing, Extreme ultraviolet lithography, Deep ultraviolet

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Proceedings Article | 23 August 2021 Paper

Study of high throughput EUV mask pattern inspection technologies using multi e-Beam optics

Tadayuki Sugimori, Riki Ogawa, Hidekazu Takekoshi, John Hartley, David Pinckney, Atsushi Ando, Koichi Ishii, Chosaku Noda, Nobutaka Kikuiri

Proceedings Volume 11908, 119080J (2021) https://doi.org/10.1117/12.2598235

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Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Study of high throughput EUV mask pattern defect inspection technologies using multibeam electron optics

Hidekazu Takekoshi, Riki Ogawa, John Hartley, David Pinckeny, Atsushi Ando, Koichi Ishii, Chosaku Noda, Tadayuki Sugimori, Nobutaka Kikuiri

Proceedings Volume 11611, 116112N (2021) https://doi.org/10.1117/12.2583613

KEYWORDS: Photomasks, Extreme ultraviolet, Optics manufacturing, Inspection, EUV optics, Defect inspection, Extreme ultraviolet lithography, Semiconductor manufacturing, Optical systems, Optical inspection

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