Dr. Sven Schröder Profile

Dr. Sven Schröder

Research Fellow at Fraunhofer IOF

SPIE Involvement:

Conference Program Committee | Author | Editor

Publications (52)

SPIE Journal Paper | 18 September 2024 Open Access

Special Section Guest Editorial: Frontiers of Optical Coatings II

Xinbin Cheng, Sven Schröder, Michel Lequime

OE, Vol. 63, Issue 09, 091601, (September 2024) https://doi.org/10.1117/12.10.1117/1.OE.63.9.091601

KEYWORDS: Optical coatings, Multilayers, Reflectivity, Optical engineering, Thin film coatings, Optical fiber cables, Infrared imaging, Chromium, Windows, Wafer level optics

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Proceedings Article | 24 June 2024 Presentation + Paper

Thin film black coatings based on interference and absorption

P. Munzert, S. Schwinde, R. Leitel, S. Kleinle, S. Shestaeva, R. Schlegel, T. Herffurth, S. Schröder

Proceedings Volume 13020, 1302004 (2024) https://doi.org/10.1117/12.3022694

KEYWORDS: Optical coatings, Reflectivity, Metals, Thin film coatings, Spectroscopy, Antireflective coatings, Thin films, Reflection, Glasses, Prisms

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Proceedings Article | 18 June 2024 Presentation

Transparent conductive nanostructures with low refractive index

Astrid Bingel, Friedrich Rickelt, Peter Munzert, Ulrike Schulz, Sven Schröder

Proceedings Volume PC13020, PC1302007 (2024) https://doi.org/10.1117/12.3023023

KEYWORDS: Electrical conductivity, Nanostructures, Refractive index, Transparent conductors, Thin films, Reflection, Antireflective coatings, Visible radiation, Reflectivity, Quantum systems

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Proceedings Article | 18 June 2024 Presentation

Surface and thin film characterization using angle resolved light scattering: from roughness and defect analysis to in-situ coating inspection

Anne-Sophie Munser, Tobias Herffurth, Christian Mühlig, Thomas Gischkat, Sven Schröder

Proceedings Volume PC13020, PC130200W (2024) https://doi.org/10.1117/12.3029579

KEYWORDS: Light scattering, Optical surfaces, Coating, Thin film coatings, Thin films, Surface finishing, Inspection, Sensors, Laser scattering, Fabrication

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Proceedings Article | 18 June 2024 Presentation

Antireflection coatings for an ultra-high vacuum quartz cell developed for quantum computing experiments

Ulrike Schulz, Friedrich Rickelt, Nancy Gratzke, Lukas Schell, Anne Gärtner, Astrid Bingel, Sven Schröder

Proceedings Volume PC13020, PC130200N (2024) https://doi.org/10.1117/12.3016941

KEYWORDS: Quantum optics experiments, Antireflective coatings, Vacuum, Quantum computing, Quartz, Windows, Quantum communications, Polarization, Chemical species, Silica

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Proceedings Article | 13 March 2024 Presentation + Paper

Nanostructured antireflective coatings for trapped ion quantum computing experiments

A. Bingel, U. Schulz, F. Rickelt, A. Gärtner, S. Schröder

Proceedings Volume 12911, 129110P (2024) https://doi.org/10.1117/12.3002283

KEYWORDS: Design, Reflectivity, Antireflective coatings, Nanostructures, Phase shifts, Silica, Polarization, Glasses, Refractive index, Quantum experiments

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Proceedings Article | 24 November 2023 Presentation + Paper

Study of high-performance IBS coatings for near-IR laser applications

Alex Ribeaud, Jürgen Pistner, Mathias Soulier, Julien Lumeau, Laurent Gallais, Rico Benz, Christoph Sturzenegger, Bernd Eiermann, Christian Mühlig, Thomas Gischkat, Sven Schröder

Proceedings Volume 12726, 1272605 (2023) https://doi.org/10.1117/12.2685243

KEYWORDS: Optical coatings, Laser scattering, Laser applications, Light absorption, Thin film coatings, Sputter deposition, Ion beams, Absorption, Visible radiation, Thin films

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Proceedings Article | 12 July 2023 Open Access

Black aperture coating with an anti-reflective clear aperture: developed and qualified for space-based applications

S. Schwinde, P. Munzert, S. Shestaeva, R. Leitel, S. Kleinle, S. Schröder

Proceedings Volume 12777, 127775I (2023) https://doi.org/10.1117/12.2691027

KEYWORDS: Coating, Prisms, Antireflective coatings, Stray light, Astronomical imaging, Transmittance, Reflectivity, Optical surfaces, Optical components, Visual inspection

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Proceedings Article | 29 August 2022 Presentation + Paper

Development of advanced silver coatings for telescope mirrors

S. Schwinde, S. Shestaeva, R. Holzlöhner, G. Willers, R. Schlegel, A. Förster, R. Parra, S. Guisard, O. Sqalli, S. Schröder

Proceedings Volume 12188, 121881X (2022) https://doi.org/10.1117/12.2627710

KEYWORDS: Reflectivity, Silver, Mirrors, Telescopes, Optical coatings, Aluminum, Reflector telescopes, Gemini Observatory, Gold, Ruthenium, Near ultraviolet

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SPIE Journal Paper | 22 December 2021 Open Access

Special Section Guest Editorial: Frontiers of Optical Coatings

Xinbin Cheng, Sven Schroder, Christopher Stolz, Xu Liu

OE, Vol. 61, Issue 03, 031201, (December 2021) https://doi.org/10.1117/12.10.1117/1.OE.61.3.031201

KEYWORDS: Optical coatings, Optical engineering, Reflectivity, Hybrid fiber optics, Thin film coatings, Optical fiber cables, Absorption, Oxygen, Mirrors, Laser systems engineering

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Proceedings Article | 12 September 2021 Paper

Properties of new transparent polymers for optical applications

Ulrike Schulz, Nancy Gratzke, Tina Seifert, Caroline Hahmann, Friedrich Rickelt, Sven Schröder

Proceedings Volume 11872, 118720J (2021) https://doi.org/10.1117/12.2597061

KEYWORDS: Polymers, Coating, Plasma, Refractive index, Plasma treatment, Precision optics, Optical properties

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Proceedings Article | 11 June 2021 Open Access

Au coatings for spaced based reflectors

Stefan Schwinde, Svetlana Shestaeva, Sven Stempfhuber, Henrik von Lukowicz, Jochen Kuhnhenn, Sven Schröder

Proceedings Volume 11852, 118521Q (2021) https://doi.org/10.1117/12.2599299

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Proceedings Article | 12 July 2019 Open Access

Stray light reduction of silicon particle reinforced aluminum for optical systems

Jan Kinast, Alexander Telle, Sven Schröder, Marcus Trost, Stefan Risse

Proceedings Volume 11180, 111802G (2019) https://doi.org/10.1117/12.2536007

KEYWORDS: Aluminum, Stray light, Silicon, Optical coatings, Particles, Fractal analysis, Mirrors, Plasma, Scattering, Light scattering

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SPIE Journal Paper | 22 May 2019 Open Access

Special Section Guest Editorial: Ultraprecision Optics Fabrication and Characterization

Dae Wook Kim, Tayyab Suratwala, Sven Schröder

OE, Vol. 58, Issue 09, 092601, (May 2019) https://doi.org/10.1117/12.10.1117/1.OE.58.9.092601

KEYWORDS: Optics manufacturing, Fabrication, Metrology, Digital Light Processing, Additive manufacturing, Optical fabrication, Optical design, Materials science, Precision optics, Optical components

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SPIE Journal Paper | 30 April 2019

Assessing surface imperfections of freeforms using a robotic light scattering sensor

Tobias Herffurth, Marcus Trost, Matthias Beier, Ralf Steinkopf, Nils Heidler, Tom Pertermann, Sven Schröder

OE, Vol. 58, Issue 09, 092609, (April 2019) https://doi.org/10.1117/12.10.1117/1.OE.58.9.092609

KEYWORDS: Sensors, Scattering, Light scattering, Spatial frequencies, Robotics, Mirrors, Surface finishing, Polishing, Laser scattering, Silver

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Proceedings Article | 4 March 2019 Presentation + Paper

Optical fiber based light scattering detection in microfluidic droplets

Shulin Wohlfeil, Sundar Hengoju, Anne-Sophie Munser, Miguel Tovar, Oksana Shvydkiv, Martin Roth, Sven Schröder, Erik Beckert, Ramona Eberhardt, Andreas Tünnermann

Proceedings Volume 10875, 1087516 (2019) https://doi.org/10.1117/12.2509248

KEYWORDS: Light scattering, Microfluidics, Optical fibers, Scatter measurement, System integration

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Proceedings Article | 15 June 2018 Paper

Simulation of defect-induced scattering in multilayer coatings

Lei Zhang, Jinlong Zhang, Sven Schröder, Marcus Trost, Hongfei Jiao, Zhanshan Wang, Xinbin Cheng

Proceedings Volume 10692, 106920E (2018) https://doi.org/10.1117/12.2309956

KEYWORDS: Scattering, Laser scattering, Multilayers, Light scattering, Optical coatings, Finite-difference time-domain method, Mie scattering, Tantalum, Diffraction

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Proceedings Article | 17 November 2017 Open Access

Light scattering techniques for the characterization of optical components

M. Hauptvogel, S. Schröder, T. Herffurth, M. Trost, A. von Finck, A. Duparré, T. Weigel

Proceedings Volume 10563, 1056347 (2017) https://doi.org/10.1117/12.2304146

KEYWORDS: Light scattering, Scattering, Bidirectional reflectance transmission function, Scatter measurement, Mirrors, Optical components, Astronomical imaging, Optical coatings, Laser scattering, Optical testing

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Proceedings Article | 25 September 2017 Open Access

Light scattering characterization of optical components for space applications

M. Hauptvogel, M. Trost, A. Costille, D. Penka, U. Zeitner, S. Schröder, A. Duparré

Proceedings Volume 10562, 1056213 (2017) https://doi.org/10.1117/12.2296113

KEYWORDS: Light scattering, Scattering, Optical components, Scatter measurement, Astronomical imaging, Sensors, Diffraction, Bidirectional reflectance transmission function, Optical testing, Diffraction gratings

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Proceedings Article | 3 May 2017 Presentation + Paper

Scattering properties of hot isostatic pressed multispectral zinc sulfide

Marcus Trost, Nadja Felde, Sven Schröder, Shay Joseph, Arit Shienmann

Proceedings Volume 10179, 101790D (2017) https://doi.org/10.1117/12.2262552

KEYWORDS: Scattering, Light scattering, Laser scattering, Visible radiation, Zinc, Infrared imaging, Infrared radiation, Imaging systems, Optics manufacturing, Manufacturing, Surface roughness, Platinum, Sensors, Scatter measurement

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Proceedings Article | 5 October 2016 Presentation + Paper

Linking Rayleigh-Rice theory with near linear shift invariance in light scattering phenomena

John Stover, Sven Schroeder, Chris Staats, Vladimir Lopushenko, Eugene Church

Proceedings Volume 9961, 996102 (2016) https://doi.org/10.1117/12.2238567

KEYWORDS: Light scattering, Bidirectional reflectance transmission function, Geometrical optics, Scattering, Diffraction, Spatial frequencies, Gold, Scatter measurement, Diffraction gratings, Metrology

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Proceedings Article | 22 May 2015 Paper

Angle resolved backscatter of HfO2/SiO2 multilayer mirror at 1064 nm

Jue Wang, Sven Schröder, Marcus Trost, Matthias Hauptvogel, Angela Duparré

Proceedings Volume 9453, 94530T (2015) https://doi.org/10.1117/12.2190663

KEYWORDS: Backscatter, Multilayers, Light scattering, Mirrors, Scattering, Plasma, Coating, Scatter measurement, Atomic force microscopy, Optical testing

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Proceedings Article | 16 March 2015 Paper

Sub-aperture EUV collector with dual-wavelength spectral purity filter

Torsten Feigl, Marco Perske, Hagen Pauer, Tobias Fiedler, Uwe Zeitner, Robert Leitel, Hans-Christoph Eckstein, Philipp Schleicher, Sven Schröder, Marcus Trost, Stefan Risse, Ralf Steinkopf, Frank Scholze, Christian Laubis

Proceedings Volume 9422, 94220E (2015) https://doi.org/10.1117/12.2175666

KEYWORDS: Extreme ultraviolet, Reflectivity, Mirrors, Optical filters, Binary data, Carbon dioxide lasers, Diffraction, Infrared radiation, Multilayers, Spherical lenses

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Proceedings Article | 5 November 2014 Paper

Light scattering characterization of optical components: BRDF, BTDF, and scatter losses

Sven Schröder, Alexander Finck, Dina Katsir, Uwe Zeitner, Angela Duparré

Proceedings Volume 9272, 927202 (2014) https://doi.org/10.1117/12.2071908

KEYWORDS: Light scattering, Scattering, Bidirectional reflectance transmission function, Optical coatings, Optical components, Scatter measurement, Diffraction gratings, Stray light, Mirrors, Data modeling

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SPIE Journal Paper | 17 September 2014 Open Access

Special Section Guest Editorial: Optical Fabrication, Testing, and Metrology

Daniel Malacara-Hernández, Joanna Schmit, Sven Schröder

OE, Vol. 53, Issue 09, 092001, (September 2014) https://doi.org/10.1117/12.10.1117/1.OE.53.9.092001

KEYWORDS: Optical fabrication, Optical testing, Optics manufacturing, Metrology, Optical engineering, Optical components, Surface finishing, Precision optics, Thin films, Magnetorheological finishing

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SPIE Journal Paper | 11 August 2014

In situ and ex situ characterization of optical surfaces by light scattering techniques

Marcus Trost, Tobias Herffurth, Sven Schröder, Angela Duparré, Matthias Beier, Stefan Risse, Andreas Tünnermann, Norbert Bowering

OE, Vol. 53, Issue 09, 092013, (August 2014) https://doi.org/10.1117/12.10.1117/1.OE.53.9.092013

KEYWORDS: Light scattering, Scattering, Scatter measurement, Spatial frequencies, Mirrors, Sensors, Magnetorheological finishing, Optics manufacturing, Polishing, Optical testing

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Proceedings Article | 19 September 2013 Paper

Roughness, optical, and wetting properties of nanostructured thin films

Sven Schröder, Luisa Coriand, Angela Duparré

Proceedings Volume 8818, 88180S (2013) https://doi.org/10.1117/12.2027347

KEYWORDS: Light scattering, Spatial frequencies, Coating, Thin film coatings, Atomic force microscopy, Stochastic processes, Nanostructures, Scattering, Chemistry, Thin films

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Proceedings Article | 7 September 2013 Paper

Estimating hemispherical scatter from incident plane measurements of isotropic samples scattering from both bulk and surface irregularities

John Stover, Sven Schroeder, Alexander von Finck, David Unglaub, Angela Duparré

Proceedings Volume 8838, 883803 (2013) https://doi.org/10.1117/12.2024550

KEYWORDS: Bidirectional reflectance transmission function, Scattering, Spatial frequencies, Reflection, Scatter measurement, Laser scattering, Statistical analysis, Aluminum, Light scattering, Surface roughness

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Proceedings Article | 7 September 2013 Paper

Angle and wavelength resolved light scattering measurement of optical surfaces and thin films

Sven Schröder, David Unglaub, Alexander von Finck, Matthias Hauptvogel, Marcus Trost, Tobias Herffurth, Angela Duparré, John Stover

Proceedings Volume 8838, 883802 (2013) https://doi.org/10.1117/12.2024144

KEYWORDS: Light scattering, Scattering, Scatter measurement, Optical testing, Coating, Thin films, Optical components, Etching, Thin film coatings, Optical spheres

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Proceedings Article | 9 July 2013 Paper

Using light scattering to investigate damage-relevant imperfections of surfaces, coatings, and bulk materials

Sven Schröder, Marcus Trost, Tobias Herffurth, Angela Duparré

Proceedings Volume 8786, 87860S (2013) https://doi.org/10.1117/12.2020478

KEYWORDS: Scattering, Light scattering, Laser scattering, Scatter measurement, Optical coatings, 3D metrology, Rayleigh scattering, Surface finishing, Optical components, Thin film coatings

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Proceedings Article | 4 December 2012 Paper

Light scattering to detect imperfections relevant for laser-induced damage

Tobias Herffurth, Sven Schröder, Marcus Trost, Angela Duparré

Proceedings Volume 8530, 85301B (2012) https://doi.org/10.1117/12.977453

KEYWORDS: Light scattering, Scattering, Laser scattering, Surface finishing, Laser induced damage, Polishing, Sensors, Optical coatings, Autoregressive models, Interfaces

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Proceedings Article | 19 October 2012 Paper

Roughness characterization of EUV multilayer coatings and ultra-smooth surfaces by light scattering

M. Trost, S. Schröder, C. C. Lin, A. Duparré, A. Tünnermann

Proceedings Volume 8501, 85010F (2012) https://doi.org/10.1117/12.929887

KEYWORDS: Light scattering, Multilayers, Scattering, Extreme ultraviolet, Scatter measurement, Interfaces, Spatial frequencies, Atomic force microscopy, Optical testing, Surface roughness

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Proceedings Article | 15 October 2012 Paper

Estimating hemispherical scatter from incident plane measurements of isotropic samples

John Stover, Sven Schröder, Alexander von Finck, Angela Duparré

Proceedings Volume 8495, 84950F (2012) https://doi.org/10.1117/12.930773

KEYWORDS: Bidirectional reflectance transmission function, Scattering, 3D metrology, Spatial frequencies, Scatter measurement, Statistical analysis, Laser scattering, Stray light, Specular reflections, Silicon

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Proceedings Article | 15 October 2012 Paper

Upper roughness limitations on the TIS/RMS relationship

John Stover, Sven Schröder, Thomas Germer

Proceedings Volume 8495, 849503 (2012) https://doi.org/10.1117/12.930770

KEYWORDS: Diffraction, Reflectivity, Silicon, Ocean optics, Light scattering, Diffraction gratings, Spatial frequencies, Specular reflections, Integrated optics, Radar

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Proceedings Article | 15 October 2012 Paper

Sophisticated light scattering techniques from the VUV to the IR regions

Sven Schröder, Marcus Trost, Tobias Herffurth, Alexander von Finck, Angela Duparré

Proceedings Volume 8495, 84950V (2012) https://doi.org/10.1117/12.929923

KEYWORDS: Scattering, Light scattering, Scatter measurement, 3D metrology, Laser scattering, Thin film coatings, Diffraction gratings, Optical testing, Vacuum ultraviolet, Surface finishing

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Proceedings Article | 23 March 2012 Paper

Optical performance of LPP multilayer collector mirrors

Torsten Feigl, Marco Perske, Hagen Pauer, Tobias Fiedler, Sergiy Yulin, Marcus Trost, Sven Schröder, Angela Duparré, Norbert Kaiser, Andreas Tünnermann, Norbert Böwering, Alex Ershov, Kay Hoffmann, Bruno La Fontaine, Kevin Cummings

Proceedings Volume 8322, 832217 (2012) https://doi.org/10.1117/12.919735

KEYWORDS: Mirrors, Extreme ultraviolet, Coating, Reflectivity, Multilayers, EUV optics, Light sources, Plasma, Extreme ultraviolet lithography, Light scattering

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SPIE Journal Paper | 6 February 2012

Total integrated scatter from surfaces with arbitrary roughness, correlation widths, and incident angles

James Harvey, Narak Choi, Sven Schroeder, Angela Duparré

OE, Vol. 51, Issue 1, 013402, (February 2012) https://doi.org/10.1117/12.10.1117/1.OE.51.1.013402

KEYWORDS: Spatial frequencies, Surface roughness, Optical fabrication, Image quality, Tolerancing, Optical engineering, Extreme ultraviolet, Metrology, Bidirectional reflectance transmission function, Surface finishing

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Proceedings Article | 30 September 2011 Paper

Impact of surface roughness on the scatter losses and the scattering distribution of surfaces and thin film coatings

Sven Schröder, Tobias Herffurth, Angela Duparré, James Harvey

Proceedings Volume 8169, 81690R (2011) https://doi.org/10.1117/12.896989

KEYWORDS: Scattering, Light scattering, Surface roughness, Thin film coatings, Surface finishing, Scatter measurement, Rayleigh scattering, Autoregressive models, Thin films, Interfaces

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Proceedings Article | 30 September 2011 Paper

Roughness characterization of large EUV mirror optics by laser light scattering

Marcus Trost, Sven Schröder, Torsten Feigl, Angela Duparré, Andreas Tünnermann

Proceedings Volume 8169, 81690P (2011) https://doi.org/10.1117/12.896792

KEYWORDS: Extreme ultraviolet, Light scattering, Reflectivity, Scattering, Mirrors, EUV optics, Scatter measurement, Coating, Surface finishing, Laser optics

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Proceedings Article | 27 September 2011 Paper

Determining parametric TIS behavior from optical fabrication metrology data

James Harvey, Sven Shröder, Narak Choi, Angela Duparré

Proceedings Volume 8126, 81260X (2011) https://doi.org/10.1117/12.894571

KEYWORDS: Spatial frequencies, Surface roughness, Optical fabrication, Metrology, Scattering, Tolerancing, Surface finishing, Optics manufacturing, Bidirectional reflectance transmission function, Image analysis

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Proceedings Article | 8 April 2011 Paper

Efficient specification and characterization of surface roughness for extreme ultraviolet optics

Sven Schröder, Marcus Trost, Torsten Feigl, James Harvey, Angela Duparré

Proceedings Volume 7969, 79692C (2011) https://doi.org/10.1117/12.891280

KEYWORDS: Light scattering, Mirrors, Extreme ultraviolet, Spatial frequencies, Scattering, Surface roughness, EUV optics, Scatter measurement, Surface finishing, Manufacturing

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Proceedings Article | 31 December 2009 Paper

Angle resolved scattering: a method for in situ investigations of laser-induced damage?

Sven Schröder, Tobias Herffurth, Angela Duparré

Proceedings Volume 7504, 75041H (2009) https://doi.org/10.1117/12.850389

KEYWORDS: Coating, Scattering, Light scattering, Laser induced damage, Scatter measurement, Interfaces, Multilayers, Laser scattering, Thin film coatings, Autoregressive models

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Proceedings Article | 25 September 2008 Paper

Finish assessment of complex surfaces by advanced light scattering techniques

Sven Schröder, Angela Duparré

Proceedings Volume 7102, 71020F (2008) https://doi.org/10.1117/12.797964

KEYWORDS: Light scattering, Scattering, Scatter measurement, Surface finishing, Mirrors, Polishing, Extreme ultraviolet, Optical testing, Spatial frequencies, 3D metrology

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Proceedings Article | 21 March 2008 Paper

Scattering of EUV optics: substrate, coating, and degradation effects

Sven Schröder, Nicolas Benoit, Torsten Feigl, Angela Duparré, Andreas Tünnermann

Proceedings Volume 6921, 69212Q (2008) https://doi.org/10.1117/12.772609

KEYWORDS: Scattering, Reflectivity, Coating, Mirrors, Multilayers, Extreme ultraviolet, Interfaces, Scatter measurement, EUV optics, Autoregressive models

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Proceedings Article | 15 January 2007 Paper

Characterization of thin films and bulk materials for DUV optical components

Sven Schröder, Mathias Kamprath, Angela Duparré

Proceedings Volume 6403, 64031L (2007) https://doi.org/10.1117/12.695408

KEYWORDS: Scattering, Deep ultraviolet, Silica, Optical components, Polishing, Thin film coatings, Autoregressive models, Interfaces, Light scattering, Thin films

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Proceedings Article | 23 February 2006 Paper

Scattering analysis of optical components in the DUV

Sven Schröder, Stefan Gliech, Angela Duparré

Proceedings Volume 6101, 61011H (2006) https://doi.org/10.1117/12.647416

KEYWORDS: Scattering, Light scattering, Scatter measurement, Multilayers, Deep ultraviolet, Atomic force microscopy, Optical components, Mirrors, Extreme ultraviolet, Optical spheres

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Proceedings Article | 20 October 2005 Paper

Sensitive and flexible light scatter techniques from the VUV to IR regions

Sven Schröder, Stefan Gliech, Angela Duparré

Proceedings Volume 5965, 59651B (2005) https://doi.org/10.1117/12.625780

KEYWORDS: Light scattering, Scattering, Scatter measurement, Multilayers, Vacuum ultraviolet, Mirrors, Autoregressive models, Deep ultraviolet, Optical spheres, Backscatter

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Proceedings Article | 5 October 2005 Paper

Nanostructure and optical properties of fluoride films for high-quality DUV/VUV optical components

Sven Schröder, Hein Uhlig, Angela Duparré, Norbert Kaiser

Proceedings Volume 5963, 59630R (2005) https://doi.org/10.1117/12.624499

KEYWORDS: Mirrors, Multilayers, Reflectivity, Atomic force microscopy, Absorption, Interfaces, Deep ultraviolet, Vacuum ultraviolet, Single mode fibers, Optical components

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Proceedings Article | 1 September 2005 Paper

Surface texture investigation of ultra-precision optical components

Sven Schroeder, Juliane Ratteit, Stefan Gliech, Angela Duparre

Proceedings Volume 5878, 587813 (2005) https://doi.org/10.1117/12.616500

KEYWORDS: Scattering, Light scattering, Mirrors, Multilayers, Optics manufacturing, Autoregressive models, Scatter measurement, Sensors, Interfaces, Atomic force microscopy

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Proceedings Article | 31 August 2005 Paper

Scatter analysis of optical components from 193 nm to 13.5 nm

Sven Schroeder, Mathias Kamprath, Stefan Gliech, Angela Duparre

Proceedings Volume 5878, 58780T (2005) https://doi.org/10.1117/12.616423

KEYWORDS: Scattering, Light scattering, Extreme ultraviolet, Scatter measurement, Optical components, Mirrors, Multilayers, Laser scattering, Autoregressive models, Deep ultraviolet

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Proceedings Article | 31 August 2005 Paper

Investigating the ArF laser stability of CaF2 at elevated fluences

A. Burkert, Ch. Muehlig, W. Triebel, D. Keutel, U. Natura, L. Parthier, S. Gliech, S. Schroeder, A. Duparre

Proceedings Volume 5878, 58780E (2005) https://doi.org/10.1117/12.616904

KEYWORDS: Absorption, Scattering, Laser induced fluorescence, Laser scattering, Laser irradiation, Laser stabilization, Excimers, Light scattering, Luminescence, Excimer lasers

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