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Shuen-Chen Lei
Staff Engineer at United Microelectronics Corp
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Publications (1)
Proceedings Article | 5 April 2007 Paper
Contact leakage and open monitoring with an advanced e-beam inspection system
Shuen-chen Lei, Hermes Liu, Mingsheng Tsai, Hung-Chi Wu, Hong Xiao, Jack Jau
Proceedings Volume 6518, 65184I (2007) https://doi.org/10.1117/12.711761
KEYWORDS: Inspection, Virtual colonoscopy, Transmission electron microscopy, Defect inspection, Semiconducting wafers, Oxides, Scanning electron microscopy, Tungsten, Defect detection, Sensors
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