Dr. Shizhong Su Profile

Dr. Shizhong Su

at Cardiff Univ

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Author

Publications (2)

Proceedings Article | 25 June 2007 Paper

Current developments and applications using multi-beam laser interference lithography for nanoscale structuring of materials

S. Z. Su, Ainhara Rodríguez, Santiago Olaizola, C. S. Peng, C. Tan, Yury Verevkin, Thierry Berthoud, Stéphane Tisserand

Proceedings Volume 6593, 65930G (2007) https://doi.org/10.1117/12.723620

KEYWORDS: Beam splitters, Fabrication, Optical lithography, Lithography, Nanolithography, Laser ablation, Photoresist materials, Laser crystals, Thin films, Laser applications

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Proceedings Article | 17 October 2006 Paper

Reference pattern-based 2D measurement with nano resolution

Zuobin Wang, Shizhong Su, Yury Konstantinovich Verevkin, Sergej Fatikow

Proceedings Volume 6376, 63760M (2006) https://doi.org/10.1117/12.685924

KEYWORDS: Lithography, Manufacturing, Image processing, Packaging, Statistical analysis, Scanning electron microscopy, Nanotechnology, 193nm lithography, Optical lithography, Fringe analysis

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