Mr. Shingo Anzai Profile

Shingo Anzai

at Toppan Printing Co Ltd

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Publications (2)

Proceedings Article | 20 May 2006 Paper

Sulfate-free photomask cleaning technology

Shingo Anzai, Noriaki Takagi, Tomoaki Kamiyama, Naotoshi Kawaguchi, Mikio Ishijima, Toshimitsu Watanabe, Hiroaki Morimoto, Tsuneaki Kuwajima, Makito Nakatsu, Shin-ichi Hasegawa

Proceedings Volume 6283, 62830B (2006) https://doi.org/10.1117/12.681737

KEYWORDS: Ozone, Photomasks, Air contamination, Photoresist processing, Mask cleaning, Transmittance, Signal attenuation, Contamination, Visualization, Halftones

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Proceedings Article | 28 August 2003 Paper

Improvement of critical dimension stability of chemically amplified resist by overcoat II

Teruhiko Kumada, Koji Tange, Kazuyuki Maetoko, Kunihiro Hosono, Masayoshi Tsuzuki, Kyoichi Yonetani, Reiji Terada, Yukio Nakashiba, Shingo Anzai, Yasutaka Kikuchi

Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504182

KEYWORDS: Critical dimension metrology, Photomasks, Chemically amplified resists, Manufacturing, Polymers, Photoresist processing, Coating, Diffusion, Semiconducting wafers, Molecules

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