Dr. Seyed Moein Ghafoori Profile

Dr. Seyed Moein Ghafoori

at Resolve BioSciences GmbH

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Author

Publications (4)

Proceedings Article | 22 February 2021 Poster + Paper

Broadband scatterometry at extreme ultraviolet wavelengths for nanograting characterization

Moein Ghafoori, Lukas Bahrenberg, Sven Glabisch, Sophia Schroeder, Serhiy Danylyuk, Sascha Brose, Jochen Stollenwerk, Larissa Juschkin, Peter Loosen

Proceedings Volume 11611, 116112F (2021) https://doi.org/10.1117/12.2584738

KEYWORDS: Scatterometry, Extreme ultraviolet, Diffraction, Metrology, Diffraction gratings, Nanostructures, Inspection, Grazing incidence, Statistical modeling, Spectroscopy

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Proceedings Article | 20 March 2020 Paper

Nanoscale grating characterization through EUV spectroscopy aided by machine learning techniques

Lukas Bahrenberg, Sven Glabisch, Serhiy Danylyuk, Moein Ghafoori, Sophia Schröder, Sascha Brose, Jochen Stollenwerk, Peter Loosen

Proceedings Volume 11325, 113250X (2020) https://doi.org/10.1117/12.2550508

KEYWORDS: Extreme ultraviolet, Reflectivity, Diffraction gratings, Diffraction, Databases, Spectroscopy, Neural networks, Silica, Chromium, Machine learning

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Proceedings Article | 26 September 2019 Paper

Laboratory-based EUV spectroscopy for the characterization of thin films, membranes and nanostructured surfaces

Lukas Bahrenberg, Sven Glabisch, Moein Ghafoori, Sascha Brose, Serhiy Danylyuk, Jochen Stollenwerk, Peter Loosen

Proceedings Volume 11147, 111471X (2019) https://doi.org/10.1117/12.2536884

KEYWORDS: Extreme ultraviolet, Spectroscopy, Reflectivity, Thin films, Extreme ultraviolet lithography, Interfaces, Metrology, Transmittance, Pellicles, Reflectance spectroscopy

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Proceedings Article | 26 March 2019 Paper

Spectroscopic reflectometry in the extreme ultraviolet for critical dimension metrology

Lukas Bahrenberg, Serhiy Danylyuk, Robert Michels, Sven Glabisch, Moein Ghafoori, Sascha Brose, Jochen Stollenwerk, Peter Loosen

Proceedings Volume 10959, 109591X (2019) https://doi.org/10.1117/12.2513173

KEYWORDS: Reflectivity, Extreme ultraviolet, Reflectance spectroscopy, Metrology, Critical dimension metrology, Spectroscopy, Reflectometry, Grazing incidence, Scanning electron microscopy, Scatterometry

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