We present a profilometry for measuring aspheric surface, which determines the curvature from the sub-aperture topography along two orthogonal directions and then reconstructs the entire surface profile from the measured curvature data. The entire surface was divided into a number of sub-apertures with overlapping zones. Each sub-aperture was measured using white-light scanning interferometry to avoid any optical alignment error along an optical axis. Simulation studies are also presented based on the mathematical model. The proposed mathematical model was also experimentally tested on freeform surfaces using white-light scanning interferometry under deveolpment.
We present a method of aspheric surface reconstruction from the curvature data along two orthogonal directions. The curvature is an intrinsic property of the artifact, which does not depend on the positioning error of a measuring sensor. In this paper, we showed that the curvature method is suitable for aspheric surface reconstruction along one direction and expanded this algorithm to two directions. Computer simulations were undertaken to explore the possibility of three-dimensional surface reconstruction. The simulation results and the position error diagnosis showed that the curvature method is robust against various positioning errors.
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