Mr. Seejun Jeong Profile

Seejun Jeong

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Publications (2)

Proceedings Article | 18 March 2014 Paper

Imaging performance of attenuated phase-shift mask using coherent scattering microscope

Jae Uk Lee, SeeJun Jeong, Seong Chul Hong, Seung Min Lee, Jinho Ahn

Proceedings Volume 9048, 90481X (2014) https://doi.org/10.1117/12.2045877

KEYWORDS: Photomasks, Phase shifts, Extreme ultraviolet, Extreme ultraviolet lithography, Nanoimprint lithography, Microscopes, Inspection, Scattering, Diffraction, Binary data

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Proceedings Article | 1 April 2013 Paper

Stochastic resist patterning simulation using attenuated PSM for EUV lithography

Seongchul Hong, Seejun Jeong, Jae Uk Lee, Seung Min Lee, Jongseok Kim, Jonggul Doh, Jinho Ahn

Proceedings Volume 8679, 867928 (2013) https://doi.org/10.1117/12.2011362

KEYWORDS: Optical lithography, Photomasks, Extreme ultraviolet lithography, Phase shifts, Line edge roughness, Line width roughness, Extreme ultraviolet, Stochastic processes, Critical dimension metrology, Molybdenum

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