Mr. Se-Hun Oh Profile

Se-Hun Oh

at Hanyang Univ

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Publications (2)

Proceedings Article | 11 October 2018 Paper

A possible wafer heating during EUV exposure

Se-Hun Oh, Sung-Gyu Lee, Jae-Hun Park, Chung-Hyun Ban, Hye-Keun Oh

Proceedings Volume 10809, 108091R (2018) https://doi.org/10.1117/12.2502918

KEYWORDS: Extreme ultraviolet, Infrared radiation, Semiconducting wafers, Extreme ultraviolet lithography, Finite element methods, Lithography, Optical lithography, EUV optics, Reflectivity, Wafer-level optics

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Proceedings Article | 9 October 2018 Presentation + Paper

Pattern degradation with larger particles on EUV pellicle

Hee-Ra No, Sung-Gyu Lee, Se-Hun Oh, Hye-Keun Oh

Proceedings Volume 10809, 108091G (2018) https://doi.org/10.1117/12.2502784

KEYWORDS: Particles, Extreme ultraviolet, Pellicles, Critical dimension metrology, Optical lithography, Extreme ultraviolet lithography, Photomasks, Contamination, Applied physics, Lithography

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