Dr. Scott C. Burkhart Profile

Dr. Scott C. Burkhart

Manager/NIF Project

SPIE Involvement:

Author

Area of Expertise:

Laser Alignment , Laser Diagnostics , Electromagnetics , High-speed transient electronics

Profile Summary

Responsible for operations maintenance for NIF Laser systems, including system alignment, oscillator systems, preamplifer systems, power amplifier, diagnostics, final optics, optics inspection. Prior to this was responsible for developing precision placement and laser alignment systems for NIF, the worlds most energetic laser system. Has a fundamental patent on the NIF laser pulseshaping system. Two papers in 2010 and 2011 through SPIE and OSA detail NIF laser alignment innovations which led to the present successful operating system. Prior to NIF, was responsible for a number of high-speed electronics and microwave engineering systems for Lawrence Livermore National Laboratory.

Publications (22)

Proceedings Article | 26 February 2015 Paper

Paper

Near field intensity trends of main laser alignment images in the National Ignition Facility (NIF)

Richard Leach, Ilona Beltsar, Scott Burkhart, Roger Lowe-Webb, Victoria Miller-Kamm, Thad Salmon, Karl Wilhelmsen

Proceedings Volume 9345, 93450D (2015) https://doi.org/10.1117/12.2084006

KEYWORDS: National Ignition Facility, Cameras, Sensors, Databases, Optical alignment, Near field, Optical amplifiers, Near field optics, Diagnostics, Attenuators

Read Abstract +

Proceedings Article | 20 February 2013 Paper

Paper

The National Ignition Facility: beam area increase

S. Burkhart, A. Awwal, M. Borden, T. Budge, J. Campbell, S. Dixit, M. Henesian , K. Jancaitis, D. Jedlovec, R. Leach, R. Lowe-Webb, B. MacGowan, S. Pratuch, J. Palma, T. Salmon, D. Smauley, L. Smith, S. Sommer, P. Wegner, K. Wilhelmsen, M. Witte, N. Wong

Proceedings Volume 8602, 860203 (2013) https://doi.org/10.1117/12.2009402

KEYWORDS: National Ignition Facility, Relays, Optical amplifiers, Telescopes, Image processing, Fusion energy, Data acquisition, Mirrors, Laser energy, Spatial filters

Read Abstract +

Proceedings Article | 15 October 2012 Paper

Paper

An overview of target and diagnostic alignment at the National Ignition Facility

D. Kalantar, P. Di Nicola, N. Shingleton, S. Burkhart, J. Dzenitis, J. Klingmann, J. Lawson, J. Lutz, D. Manha, A. Manuel, T. Mccarville, Elizabeth Palma, D. Pigg, K. Widmann, R. Wood

Proceedings Volume 8505, 850509 (2012) https://doi.org/10.1117/12.969066

KEYWORDS: Diagnostics, National Ignition Facility, Cameras, Optical alignment, Sensors, Prisms, X-rays, Calibration, Mirrors, X-ray optics

Read Abstract +

Proceedings Article | 22 September 2011 Paper

Paper

Effects on beam alignment due to neutron-irradiated CCD images at the National Ignition Facility

Abdul A. S. Awwal, Anastacia Manuel, Philip Datte, Mark Eckart, Mark Jackson, Steve Azevedo, Scott Burkhart

Proceedings Volume 8134, 81340J (2011) https://doi.org/10.1117/12.897312

KEYWORDS: Cameras, National Ignition Facility, Charge-coupled devices, Sensors, Image processing, CCD cameras, Image fusion, Radiation effects, CCD image sensors, Detection and tracking algorithms

Read Abstract +

Proceedings Article | 8 September 2010 Paper

Paper

The National Ignition Facility: alignment from construction to shot operations

S. Burkhart, E. Bliss, P. Di Nicola, D. Kalantar, R. Lowe-Webb, T. McCarville, D. Nelson, T. Salmon, T. Schindler, J. Villanueva, K. Wilhelmsen

Proceedings Volume 7797, 77970M (2010) https://doi.org/10.1117/12.861485

KEYWORDS: National Ignition Facility, Mirrors, Spatial filters, Kinematics, Optical alignment, Image processing, Control systems, Optical amplifiers, Sensors, Relays

Read Abstract +

Proceedings Article | 9 March 2007 Paper

Paper

The injection laser system on the National Ignition Facility

Mark Bowers, Scott Burkhart, Simon Cohen, Gaylen Erbert, John Heebner, Mark Hermann, Don Jedlovec

Proceedings Volume 6451, 64511M (2007) https://doi.org/10.1117/12.700478

KEYWORDS: Mirrors, National Ignition Facility, Diagnostics, Laser systems engineering, Oscillators, Sensors, Beam shaping, Optical amplifiers, Modulators, Fiber amplifiers

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Proceedings Article | 16 September 2005 Paper

Paper

Detection of off-normal images for NIF automatic alignment

James Candy, Abdul Awwal, Wilbert Mcclay, S. Walter Ferguson, Scott Burkhart

Proceedings Volume 5907, 59070B (2005) https://doi.org/10.1117/12.621322

KEYWORDS: Image processing, National Ignition Facility, Automatic alignment, Sensors, Image classification, Detection and tracking algorithms, Fusion energy, Image fusion, Imaging systems, Mirrors

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SPIE Journal Paper | 1 December 2004

Alignment and wavefront control systems of the National Ignition Facility

Richard Zacharias, Neil Beer, Erlan Bliss, Scott Burkhart, Simon Cohen, Steven Sutton, R. Van Atta, Scott Winters, Joseph Thaddeus Salmon, Milton Latta, Christopher Stolz, David Pigg, Timothy Arnold

OE, Vol. 43, Issue 12, (December 2004) https://doi.org/10.1117/12.10.1117/1.1815331

KEYWORDS: Wavefronts, National Ignition Facility, Control systems, Sensors, Mirrors, Actuators, Optical amplifiers, Optical alignment, Optical engineering

Read Abstract +

Proceedings Article | 4 November 2004 Paper

Paper

Optimization and improvement of FOA corner cube algorithm

Wilbert McClay, Abdul Awwal, Scott Burkhart, James Candy

Proceedings Volume 5556, (2004) https://doi.org/10.1117/12.562186

KEYWORDS: National Ignition Facility, Detection and tracking algorithms, Optimization (mathematics), Algorithm development, Image filtering, Reflectors, CCD cameras, Video, Optical alignment, Electronic filtering

Read Abstract +

Proceedings Article | 4 November 2004 Paper

Paper

Accurate position sensing of defocused beams using simulated beam templates

Abdul Awwal, James Candy, Chris Haynam, Clifford Widmayer, Erlan Bliss, Scott Burkhart

Proceedings Volume 5556, (2004) https://doi.org/10.1117/12.563653

KEYWORDS: Optical simulations, Phase only filters, Electronic filtering, Diffraction, Image segmentation, National Ignition Facility, Modulation, Device simulation, Optical pattern recognition, Optical alignment

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Proceedings Article | 28 May 2004 Paper

Paper

National Ignition Facility commissioning and performance

Bruno Van Wonterghem, Scott Burkhart, Christopher Haynam, Kenneth Manes, Christopher Marshall, James Murray, Mary Spaeth, David Speck, Steven Sutton, Paul Wegner

Proceedings Volume 5341, (2004) https://doi.org/10.1117/12.538464

KEYWORDS: National Ignition Facility, Diagnostics, Sensors, Optical amplifiers, Optical alignment, Mirrors, Near field optics, Near field, Pulsed laser operation, Optical fiber cables

Read Abstract +

Proceedings Article | 28 May 2004 Paper

Paper

National Ignition Facility alignment and wavefront control

Richard Zacharias, Neil Beer, Erlan Bliss, Scott Burkhart, Simon Cohen, Steven Sutton, R. Van Atta, Scott Winters, Joseph Salmon, Christopher Stolz, David Pigg, Timothy Arnold

Proceedings Volume 5341, (2004) https://doi.org/10.1117/12.538469

KEYWORDS: Wavefronts, National Ignition Facility, Control systems, Sensors, Actuators, Mirrors, Optical amplifiers, Reticles, Laser systems engineering, Deformable mirrors

Read Abstract +

Proceedings Article | 21 July 2000 Paper

Paper

Extreme ultraviolet lithography: reflective mask technology

Christopher Walton, Patrick Kearney, Paul Mirkarimi, Joel Bowers, Charles Cerjan, Abbie Warrick, Karl Wilhelmsen, Eric Fought, Craig Moore, Cindy Larson, Sherry Baker, Scott Burkhart, Scott Hector

Proceedings Volume 3997, (2000) https://doi.org/10.1117/12.390088

KEYWORDS: Coating, Photomasks, Extreme ultraviolet lithography, Multilayers, Semiconducting wafers, Silicon, Gold, Optical spheres, Reflectivity, Defect detection

Read Abstract +

EUVL mask blanks consist of a distributed Bragg reflector made of 6.7 nm-pitch bi-layers of Mo and Si deposited upon a precision Si or glass substrate. The layer deposition process has been optimized for low defects, by application of a vendor-supplied but highly modified ion-beam sputter deposition system. This system is fully automated using SMIF technology to obtain the lowest possible environmental- and handling-added defect levels. Originally designed to coat 150 mm substrates, it was upgraded in July 1999 to 200 mm and has coated runs of over 50 substrates at a time with median added defects > 100 nm below 0.05/cm². These improvements have resulted from a number of ion-beam sputter deposition system modifications, upgrades, and operational changes, which will be discussed. Success in defect reduction is highly dependent upon defect detection, characterization, and cross- platform positional registration. We have made significant progress in adapting and extending commercial tools to this purpose, and have identified the surface scanner detection limits for different defect classes, and the signatures of false counts and non-printable scattering anomalies on the mask blank. We will present key results and how they have helped reduce added defects. The physics of defect reduction and mitigation is being investigated by a program on multilayer growth over deliberately placed perturbations (defects) of varying size. This program includes modeling of multilayer growth and modeling of defect printability. We developed a technique for depositing uniformly sized gold spheres on EUVL substrates, and have studied the suppression of the perturbations during multilayer growth under varying conditions. This work is key to determining the lower limit of critical defect size for EUV Lithography. We present key aspects of this work. We will summarize progress in all aspects of EUVL mask blank development, and present detailed results on defect reduction and mask blank performance at EUV wavelengths.

Proceedings Article | 30 December 1999 Paper

Paper

Comparison of at-wavelenth inspection, printability, and simulation of nanometer-scale substrate defects in extreme ultraviolet lithography (EUVL)

Gregory Cardinale, John Goldsmith, Avijit Ray-Chaudhuri, Aaron Fisher, Scott Hector, Pawitter Mangat, Zorian Masnyj, David Mancini, Bill Wilkinson, Jeffrey Bokor, Seongtae Jeong, Scott Burkhart, Charles Cerjan, Christopher Walton, Cindy Larson, Pei-yang Yan, Guojing Zhang

Proceedings Volume 3873, (1999) https://doi.org/10.1117/12.373339

KEYWORDS: Photomasks, Extreme ultraviolet lithography, Extreme ultraviolet, Multilayers, Inspection, Chromium, Scanning electron microscopy, Reticles, Silicon films, Printing

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Proceedings Article | 23 July 1999 Paper

Paper

Frequency converter development for the National Ignition Facility

Paul Wegner, Jerome Auerbach, Charles Barker, Scott Burkhart, Scott Couture, Jim DeYoreo, R. Hibbard, Lisa Liou, Mary Norton, Pamela Whitman, Lloyd Hackel

Proceedings Volume 3492, (1999) https://doi.org/10.1117/12.354152

KEYWORDS: Crystals, National Ignition Facility, Error analysis, Laser crystals, Data modeling, Frequency conversion, Tolerancing, Frequency converters, Performance modeling, Nonlinear crystals

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Proceedings Article | 25 June 1999 Paper

Paper

Low-defect reflective mask blanks for extreme ultraviolet lithography

Scott Burkhart, Charles Cerjan, Patrick Kearney, Paul Mirkarimi, Christopher Walton, Avijit Ray-Chaudhuri

Proceedings Volume 3676, (1999) https://doi.org/10.1117/12.351130

KEYWORDS: Photomasks, Multilayers, Silicon, Extreme ultraviolet, Semiconducting wafers, Particles, Extreme ultraviolet lithography, Reflectivity, Scanning electron microscopy, Inspection

Read Abstract +

Proceedings Article | 23 April 1999 Paper

Paper

Mask technology for EUV lithography

M. Bujak, Scott Burkhart, Charles Cerjan, Patrick Kearney, Craig Moore, Shon Prisbrey, Donald Sweeney, William Tong, Stephen Vernon, Christopher Walton, Abbie Warrick, Frank Weber, Marco Wedowski, Karl Wilhelmsen, Jeffrey Bokor, Sungho Jeong, Gregory Cardinale, Avijit Ray-Chaudhuri, Alan Stivers, Edita Tejnil, Pei-yang Yan, Scott Hector, Khanh Nguyen

Proceedings Volume 3665, (1999) https://doi.org/10.1117/12.346225

KEYWORDS: Photomasks, Extreme ultraviolet lithography, Semiconducting wafers, Multilayers, Reflectivity, Extreme ultraviolet, Silicon, Inspection, Optical lithography, Ion beams

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Proceedings Article | 7 April 1999 Paper

Paper

Laser megajoule optical components damage threshold measurements with a large-size beamlet laser (Abstract Only)

Anne Fornier, Philippe Feru, B. Pinot, Herve Leplan, G. Leroux, Scott Burkhart, Timothy Weiland

Proceedings Volume 3578, (1999) https://doi.org/10.1117/12.344454

KEYWORDS: Mirrors, Optical components, Laser damage threshold, Laser optics, Coating, Polarizers, Laser welding, Optical testing, Hybrid fiber optics

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Proceedings Article | 8 December 1997 Paper

Paper

Amplitude and phase modulation with waveguide optics

Scott Burkhart, Russell Wilcox, Donald Browning, Frank Penko

Proceedings Volume 3047, (1997) https://doi.org/10.1117/12.294351

KEYWORDS: Oscillators, Modulators, Phase modulation, National Ignition Facility, Laser scattering, Microwave radiation, Electro optics, Electrooptic modulators, Optical amplifiers, Modulation

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Proceedings Article | 8 December 1997 Paper

Paper

Description and performance of the preamplifier for the National Ignition Facility (NIF) laser system

John Crane, Mikael Martinez, Bryan Moran, Curt Laumann, James Davin, Raymond Beach, Bradley Golick, Russell Jones, John Braucht, Michael Perry, Kenneth Skulina, Frank Penko, Steve Herman, Scott Burkhart, Scott Mitchell

Proceedings Volume 3047, (1997) https://doi.org/10.1117/12.294350

KEYWORDS: Optical amplifiers, National Ignition Facility, Laser systems engineering, Amplifiers, Photodiodes, Telescopes, Pulsed laser operation, Thin films, Polarizers, Space telescopes

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Proceedings Article | 8 December 1997 Paper

Paper

High-fluence 1.05-um performance tests using 20-ns shaped pulses on the Beamlet prototype laser

Bruno Van Wonterghem, James Murray, Scott Burkhart, Frank Penko, Mark Henesian, Jerome Auerbach, Paul Wegner, John Caird

Proceedings Volume 3047, (1997) https://doi.org/10.1117/12.294345

KEYWORDS: National Ignition Facility, Spatial filters, Optical amplifiers, Modulation, Near field, Prototyping, Neodymium glass lasers, Fusion energy, Plasma, Carbon

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Proceedings Article | 8 December 1995 Paper

Paper

National Ignition Facility front-end laser system

Scott Burkhart, Raymond Beach, John Crane, James Davin, Michael Perry, Russell Wilcox

Proceedings Volume 2633, (1995) https://doi.org/10.1117/12.228290

KEYWORDS: Optical amplifiers, Fiber amplifiers, Oscillators, National Ignition Facility, Fusion energy, Glasses, Laser systems engineering, Amplifiers, Modulation, Semiconductor lasers

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Showing 5 of 22 publications

Proceedings Volume Editor (1)

SPIE Conference Volume | 20 August 2010

Optics and Photonics for Information Processing IV

Conference Committee Involvement (7)

High Power Lasers for Fusion Research IV

30 January 2017 | San Francisco, California, United States

Optical System Alignment, Tolerancing, and Verification VII

25 August 2013 | San Diego, California, United States

High-Power Lasers for Fusion Research II

7 February 2013 | San Francisco, California, United States

Optical System Alignment, Tolerancing, and Verification VI

12 August 2012 | San Diego, California, United States

Optical System Alignment, Tolerancing, and Verification V

21 August 2011 | San Diego, California, United States

Showing 5 of 7 Conference Committees

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